公开(公告)号：US20120206032A1

公开(公告)日：2012-08-16

申请号：US13369488

申请日：2012-02-09

申请人： Yoko SHINOHARA ,  Norio Chiba ,  Manabu Oumi ,  Masakazu Hirata ,  Sachiko Tanabe ,  Yoshikazu Tanaka

发明人： Yoko SHINOHARA ,  Norio Chiba ,  Manabu Oumi ,  Masakazu Hirata ,  Sachiko Tanabe ,  Yoshikazu Tanaka

IPC分类号： H01K1/00 ,  H01J9/00

CPC分类号： G11B5/4866 ,  G11B2005/0021

摘要： A U-shaped groove and a V-shaped groove are formed onto a cladding disposed on a substrate, a core and a metal structure are formed inside the grooves, respectively, and then the substrate surface is planarized. Further, after a cladding is formed again, the substrate is cut and the cut surface is polished such that the metal structure inside the V-shaped groove has a predetermined thickness, thereby forming a scattering body.

摘要翻译： 在设置在基板上的包层上形成U形槽和V形槽，分别在槽内形成铁芯和金属结构，然后将基板表面平坦化。 此外，在再次形成包层之后，切割基板，并且切割表面被抛光，使得V形槽内的金属结构具有预定厚度，从而形成散射体。