公开(公告)号：US20090130841A1

公开(公告)日：2009-05-21

申请号：US12163434

申请日：2008-06-27

申请人： Yong-Tae CHO ,  Jae-Kyun LEE ,  Sang- Rok OH

发明人： Yong-Tae CHO ,  Jae-Kyun LEE ,  Sang- Rok OH

IPC分类号： H01L21/4763

CPC分类号： H01L21/76897 ,  H01L21/76804 ,  H01L21/76844

摘要： A method for forming a contact in a semiconductor device, comprises providing a substrate, forming a plurality of conductive patterns and a passivation layer surrounding the conductive patterns over the substrate, forming an insulation layer covering the conductive patterns and passivation layer, forming a mask pattern for a contact over the insulation layer, forming a first opening by performing an isotropic etch process on the insulation layer using the mask pattern as an etch mask, wherein the isotropic etch process is performed until the insulation layer meets the passivation layer, forming a barrier layer over a resultant structure of the first opening, exposing the insulation layer by performing an anisotropic etch process using the mask pattern as an etch mask, and forming a second opening exposing the substrate by performing a self aligned contact (SAC) process using the mask pattern and barrier layer as an etch mask.

摘要翻译： 一种用于在半导体器件中形成接触的方法，包括提供衬底，在衬底上形成多个导电图案和围绕导电图案的钝化层，形成覆盖导电图案和钝化层的绝缘层，形成掩模图案 对于绝缘层上的接触，通过使用掩模图案作为蚀刻掩模对绝缘层进行各向同性蚀刻工艺形成第一开口，其中执行各向同性蚀刻工艺，直到绝缘层与钝化层相交，形成屏障 在所述第一开口的结果结构上方，通过使用所述掩模图案作为蚀刻掩模执行各向异性蚀刻工艺来暴露所述绝缘层，以及通过使用所述掩模通过执行自对准接触（SAC）工艺来形成第二开口，所述第二开口暴露所述衬底 图案和阻挡层作为蚀刻掩模。

公开(公告)号：US20110273412A1

公开(公告)日：2011-11-10

申请号：US13099714

申请日：2011-05-03

申请人： Jae-Kyun LEE ,  Jae-Young Oh ,  Dae-Jung Choi ,  Sun-Woo Kim

发明人： Jae-Kyun LEE ,  Jae-Young Oh ,  Dae-Jung Choi ,  Sun-Woo Kim

IPC分类号： G09G3/36 ,  G06F3/038

CPC分类号： G02F1/136209 ,  G02F1/134363 ,  G02F2001/136222

摘要： An array substrate for a liquid crystal display device includes: a substrate; a gate line and a data line on the substrate; a common line parallel to and spaced apart from the gate line; a thin film transistor connected to the gate line and the data line; a plurality of pixel electrodes in the pixel region; a plurality of common electrodes alternating with the plurality of pixel electrodes; at least one outermost common electrode at an edge portion of the pixel region; a black matrix corresponding to the thin film transistor, the gate line and the data line, the black matrix including an inorganic material and having an open portion; and a color filter layer in the open portion.

摘要翻译： 液晶显示装置用阵列基板包括：基板; 基板上的栅极线和数据线; 与栅极线平行并间隔开的公共线; 连接到栅极线和数据线的薄膜晶体管; 像素区域中的多个像素电极; 多个公共电极与所述多个像素电极交替; 在像素区域的边缘部分处的至少一个最外侧公共电极; 对应于薄膜晶体管，栅线和数据线的黑矩阵，黑矩阵包括无机材料并具有开口部分; 和打开部分中​​的滤色器层。