公开(公告)号：US20100172561A1

公开(公告)日：2010-07-08

申请号：US12649997

申请日：2009-12-30

申请人： Yoshihide OTA ,  Noriyuki Kato

发明人： Yoshihide OTA ,  Noriyuki Kato

IPC分类号： G06K9/00 ,  H05G1/60

CPC分类号： G01N23/046 ,  G01N23/044 ,  G01N2223/419 ,  G06T11/006 ,  G06T2211/421 ,  H01L22/00 ,  H01L2924/0002 ,  H01L2924/00

摘要： This invention provides an examination method, an examination apparatus, and an examination program capable of performing the examination corresponding to the type or the like of the site to be examined and capable of reducing the examination time when examining the substrate. The X-ray is output from an X-ray source, and the X-ray that transmitted the substrate to be examined is photographed as an X-ray perspective image in an FPD (Flat Panel Detector). The photographing for generating the reconstruction data by X-ray CT is performed at the positions on the virtual circle having the optical axis of the X-ray source as an axis, similar to the photographing for generating the reconstruction data by tomosynthesis. Thus, in generating the reconstruction data by X-ray CT, the data is converted so that each image rotates using affine conversion with the center of each X-ray perspective image as an axis according to the rotation position on the virtual circle as if the X-ray perspective images obtained at the respective positions are photographed at the positions, and then the filtering process is performed.

摘要翻译： 本发明提供一种检查方法，检查装置和检查程序，其能够进行与被检查部位的类型等相应的检查，并且能够减少检查基板时的检查时间。 从X射线源输出X射线，将被检查的基板的X射线作为FPD（平板检测器）中的X射线透视图像拍摄。 类似于通过层析合成生成重建数据的拍摄，通过X射线CT生成重建数据的拍摄在具有X射线源的光轴的虚拟圆上的位置处进行。 因此，在通过X射线CT生成重建数据时，转换数据，使得每个图像根据虚拟圆上的旋转位置以每个X射线透视图像的中心为基准，使用仿射变换旋转，就好像 在各位置拍摄在各位置获得的X射线透视图像，然后进行滤波处理。

公开(公告)号：US20120162728A1

公开(公告)日：2012-06-28

申请号：US13330007

申请日：2011-12-19

申请人： Yoshihide OTA ,  Wataru Hojo ,  Hideyuki Takemoto ,  Makoto Yoshioka

发明人： Yoshihide OTA ,  Wataru Hojo ,  Hideyuki Takemoto ,  Makoto Yoshioka

IPC分类号： H04N1/04

CPC分类号： G03G21/1619 ,  G03G15/5016 ,  G03G2215/00177 ,  H04N1/00493 ,  H04N1/00496

摘要： An image forming device includes an image forming unit, an image reading unit arranged above an upper part of the image forming unit, a sheet ejection space between the image forming unit and the image reading unit, and a supporting unit arranged on the upper part of the image forming unit to surround at least two sides of the sheet ejection space in different directions. The image reading unit is secured to the upper part of the image forming unit through the supporting unit.

摘要翻译： 图像形成装置包括图像形成单元，布置在图像形成单元的上部上方的图像读取单元，图像形成单元和图像读取单元之间的片材排出空间以及布置在图像形成单元的上部的支撑单元 所述图像形成单元围绕所述纸张排出空间的至少两侧在不同方向上包围。 图像读取单元通过支撑单元固定在图像形成单元的上部。