摘要:
A highly versatile flow-rate controller that is easy to handle and a regulator unit and a valve unit used for the same are provided. The flow-rate controller includes a regulator unit having a regulator and a first pressure sensor, a valve unit having a second pressure sensor and a flow-rate control valve, and an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit.
摘要:
Provided are a flow meter and a flow-rate control system using the same that is capable of measuring a flow rate in a minute flow-rate region with excellent measurement accuracy by preventing or suppressing the generation of bubbles and in which accumulation of the fluid and the bubbles is less likely to occur. The flow meter is for measuring a minute flow rate of a fluid flowing through a fluid channel whose outlet environment is set to constant pressure, the flow meter including a flow-rate measurement conduit portion having a predetermined length connected to an outlet-side end of the fluid channel 1 and whose outlet environment is set to constant pressure by setting the cross-sectional area of a channel smaller than the fluid channel; a pressure sensor for detecting the pressure of the fluid at the upstream side of the flow-rate measurement conduit portion by being disposed near an outlet of the fluid channel 1; and a pressure-detection control unit 4 for calculating a flow rate from a fluid pressure detected at the pressure detection part.
摘要:
Provided are a flow meter and a flow-rate control system using the same that is capable of measuring a flow rate in a minute flow-rate region with excellent measurement accuracy by preventing or suppressing the generation of bubbles and in which accumulation of the fluid and the bubbles is less likely to occur. The flow meter is for measuring a minute flow rate of a fluid flowing through a fluid channel whose outlet environment is set to constant pressure, the flow meter including a flow-rate measurement conduit portion having a predetermined length connected to an outlet-side end of the fluid channel 1 and whose outlet environment is set to constant pressure by setting the cross-sectional area of a channel smaller than the fluid channel; a pressure sensor for detecting the pressure of the fluid at the upstream side of the flow-rate measurement conduit portion by being disposed near an outlet of the fluid channel 1; and a pressure-detection control unit 4 for calculating a flow rate from a fluid pressure detected at the pressure detection part.
摘要:
Provided are an orifice member, and a differential-pressure flow meter and a flow-regulating device using the orifice member, that allow purging to be carried out easily when changing the fluid to be circulated, that are less likely to cause contamination and leaching of impurities to the circulated fluid, and that can be easily produced. The flow-regulating device includes a first pressure-measuring device (object to be connected to) that is connected to one end of the orifice member, and a second pressure-measuring device (object to be connected to) that is connected to the other end of the orifice member, and a flow-regulating valve that is connected to the downstream side of the differential-pressure flow meter, which includes the above-mentioned units. In the orifice member, a tube portion, one end of which is connected to the first pressure-measuring device and other end of which is connected to the second pressure-measuring device and whose internal part forms a channel connecting the first and second pressure-measuring devices, and an orifice provided inside the tube portion are integrated.
摘要:
Provided are an orifice member, and a differential-pressure flow meter and a flow-regulating device using the orifice member, that allow purging to be carried out easily when changing the fluid to be circulated, that are less likely to cause contamination and leaching of impurities to the circulated fluid, and that can be easily produced. The flow-regulating device includes a first pressure-measuring device (object to be connected to) that is connected to one end of the orifice member, and a second pressure-measuring device (object to be connected to) that is connected to the other end of the orifice member, and a flow-regulating valve that is connected to the downstream side of the differential-pressure flow meter, which includes the above-mentioned units. In the orifice member, a tube portion, one end of which is connected to the first pressure-measuring device and other end of which is connected to the second pressure-measuring device and whose internal part forms a channel connecting the first and second pressure-measuring devices, and an orifice provided inside the tube portion are integrated.
摘要:
A highly versatile flow-rate controller that is easy to handle and a regulator unit and a valve unit used for the same are provided. The flow-rate controller includes a regulator unit having a regulator and a first pressure sensor, a valve unit having a second pressure sensor and a flow-rate control valve, and an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit.
摘要:
An object is to provide a flow control valve that is capable of reducing or eliminating backlash generated between a male threaded portion and a female threaded portion engaged with the male threaded portion and preventing or eliminating hysteresis in the flow level. The flow control valve includes a body having a fluid inlet and a fluid outlet, a cover attachable to the body, a motor disposed in a space defined by the body and the cover, a valving element connected to a rotary shaft of the motor with a screw member, and an urging member that urges the valving element toward the motor side or toward the side opposite to the motor.
摘要:
An object is to provide a flow control valve that is capable of reducing or eliminating backlash generated between a male threaded portion and a female threaded portion engaged with the male threaded portion and preventing or eliminating hysteresis in the flow level. The flow control valve includes a body having a fluid inlet and a fluid outlet, a cover attachable to the body, a motor disposed in a space defined by the body and the cover, a valving element connected to a rotary shaft of the motor with a screw member, and an urging member that urges the valving element toward the motor side or toward the side opposite to the motor.
摘要:
A compact differential-pressure flow meter with reduced wiring is provided. The differential-pressure flow meter has first and second pressure sensors 12A and 12B fixed to a base member 14 on upstream and downstream sides of an orifice member 11 along a flow channel to determine a flow rate based on a pressure difference measured between the two sides of the orifice member 11 by the pressure sensors. The differential-pressure flow meter includes specific control boards disposed near pressure-sensing parts installed in the respective pressure-sensing device and a main control board disposed in a board installation space formed inside the base member. The specific control boards are connected to the main control board with wires passing through a plurality of wiring conduits provided in housings of the pressure-sensing device, and external wiring are connected to one of the specific control boards or to the main control board.
摘要:
A compact differential-pressure flow meter with reduced wiring is provided. The differential-pressure flow meter has first and second pressure sensors 12A and 12B fixed to a base member 14 on upstream and downstream sides of an orifice member 11 along a flow channel to determine a flow rate based on a pressure difference measured between the two sides of the orifice member 11 by the pressure sensors. The differential-pressure flow meter includes specific control boards disposed near pressure-sensing parts installed in the respective pressure-sensing device and a main control board disposed in a board installation space formed inside the base member. The specific control boards are connected to the main control board with wires passing through a plurality of wiring conduits provided in housings of the pressure-sensing device, and external wiring are connected to one of the specific control boards or to the main control board.