公开(公告)号：US5906469A

公开(公告)日：1999-05-25

申请号：US752149

申请日：1996-11-18

申请人： Yoshiji Oka ,  Yoshiteru Fukutomi ,  Masayuki Itaba ,  Yasufumi Koyama ,  Toshiya Yuge

发明人： Yoshiji Oka ,  Yoshiteru Fukutomi ,  Masayuki Itaba ,  Yasufumi Koyama ,  Toshiya Yuge

IPC分类号： B65G49/07 ,  H01L21/00

CPC分类号： H01L21/67265 ,  Y10S414/137

摘要： A substrate detecting apparatus includes: a light sensor unit having a light-emission element and a light-receiving element arranged to face each other across the cassette, and a vertical driving device for moving at least one of the light sensor unit and the cassette relative to each other in a vertical direction a substrate position detecter is also provided for detecting a vertical positional range of each substrate held in the cassette, based on a wave form of an output signal generated by the light sensor unit as the at least one of the light sensor unit and the cassette is vertically moving relative to each other. A substrate conveying apparatus includes a clearance measurement device for measuring a vertical clearance between a pair of substrates held in the cassette, and an arm driving device for inserting the conveyance arm between the pair of substrates while lifting up the conveyance arm along a slant locus when the vertical clearance is less than a predetermined critical value.

摘要翻译： 一种基板检测装置，包括：光传感器单元，具有发光元件和被配置为相对于盒子彼此相对的光接收元件;以及垂直驱动装置，用于移动光传感器单元和盒相关的至少一个 基板位置检测器还设置用于基于由光传感器单元产生的输出信号的波形来检测保持在盒中的每个基板的垂直位置范围，作为至少一个 光传感器单元和盒相对于彼此垂直移动。 基板输送装置包括用于测量保持在盒中的一对基板之间的垂直间隙的间隙测量装置和用于将输送臂插入在一对基板之间的臂驱动装置，同时沿着倾斜轨迹抬起输送臂， 垂直间隙小于预定的临界值。