公开(公告)号：US20070120054A1

公开(公告)日：2007-05-31

申请号：US11564726

申请日：2006-11-29

申请人： Young-Jee YOON ,  Jung-Taek LIM ,  Tae-Sung KIM ,  Chung-Sam JUN ,  Sung-Hong PARK

发明人： Young-Jee YOON ,  Jung-Taek LIM ,  Tae-Sung KIM ,  Chung-Sam JUN ,  Sung-Hong PARK

IPC分类号： G01N23/00

CPC分类号： G01N23/203

摘要： In an embodiment, a method of scanning a substrate, and a method and an apparatus for analyzing crystal characteristics are disclosed. A sequential scan on the scan areas using a first electron beam and a second electron beam are repeatedly performed. The electrons accumulated in the scan areas by the first electron beam are removed from the scan areas by the second electron beam. When a size of the scan area is substantially the same as a spot size of the first electron beam, adjacent scan areas partially overlap each other. When each of the scan areas is larger than a spot size of the first electron beam, the adjacent scan areas do not overlap each other. Images of the scan areas are generated using back-scattered electrons emitted from each of the scan areas by irradiating the first electron beam to analyze crystal characteristics of circuit patterns on the substrate.

摘要翻译： 在一个实施例中，公开了一种扫描衬底的方法，以及用于分析晶体特性的方法和装置。 使用第一电子束和第二电子束对扫描区域进行顺序扫描。 通过第二电子束从扫描区域去除由第一电子束累积在扫描区域中的电子。 当扫描区域的尺寸与第一电子束的光斑尺寸基本相同时，相邻的扫描区域彼此部分重叠。 当每个扫描区域大于第一电子束的光斑尺寸时，相邻的扫描区域彼此不重叠。 通过照射第一电子束来分析从每个扫描区域发射的背散射电子来分析扫描区域的图像，以分析衬底上的电路图案的晶体特性。

公开(公告)号：US20070030479A1

公开(公告)日：2007-02-08

申请号：US11462954

申请日：2006-08-07

申请人： Sung-Hong PARK ,  Young-Jee YOON ,  Jung-Taek LIM ,  Chung-Sam JUN

发明人： Sung-Hong PARK ,  Young-Jee YOON ,  Jung-Taek LIM ,  Chung-Sam JUN

IPC分类号： G01N21/88

CPC分类号： G01N21/9501

摘要： In a method, with improved utilization of memory, of inspecting a defect on an object, the object is divided into a plurality of inspection regions. A plurality of levels is determined according to the numbers of defects, which are expected before detecting the defects, on the inspection regions. The defects on a selected inspection region are detected. The level including a range, which corresponds to the number of defects detected on the selected inspection region, is assigned to the selected inspection region with reference to the number of defects detected on the selected inspection region. The steps of detecting defects and assigning levels are repeated with respect to remaining inspection regions.

摘要翻译： 在一种方法中，通过改善存储器的利用率，检查物体上的缺陷，物体被分成多个检查区域。 根据在检测区域之前预期的缺陷数量来确定多个级别。 检测到所选择的检查区域的缺陷。 参考在所选择的检查区域上检测到的缺陷的数量，将包括对应于在所选择的检查区域上检测到的缺陷数量的范围的级别分配给所选择的检查区域。 相对于剩余的检查区域重复检测缺陷和分配水平的步骤。