公开(公告)号：US09390490B2

公开(公告)日：2016-07-12

申请号：US13520210

申请日：2010-12-22

申请人： Yuji Takagi ,  Minoru Harada ,  Ryo Nakagaki ,  Naoki Hosoya ,  Toshifumi Honda ,  Takehiro Hirai

发明人： Yuji Takagi ,  Minoru Harada ,  Ryo Nakagaki ,  Naoki Hosoya ,  Toshifumi Honda ,  Takehiro Hirai

IPC分类号： H04N7/18 ,  G06T7/00 ,  H01L21/66

CPC分类号： G06T7/001 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.

摘要翻译： 在使用复查SEM执行电路图案的编程点检查时，即使在要检查的电路图案的变化大的情况下，也可以抑制误报的产生而进行稳定的检查。 通过使用评价SEM将预定电路图案顺序成像获得的SEM图像存储在存储单元中。 从存储的SEM图像中选择满足设定条件的图像，并平均以创建平均图像（GP图像）。 通过使用该GP图像通过GP比较进行模式检查，即使当电路图案的变化大时也可以在抑制伪报告的产生的同时执行检查。

公开(公告)号：US20130070078A1

公开(公告)日：2013-03-21

申请号：US13520210

申请日：2010-12-22

申请人： Yuji Takagi ,  Minoru Harada ,  Ryo Nakagaki ,  Naoki Hosoya ,  Toshifumi Honda ,  Takehiro Hirai

发明人： Yuji Takagi ,  Minoru Harada ,  Ryo Nakagaki ,  Naoki Hosoya ,  Toshifumi Honda ,  Takehiro Hirai

IPC分类号： H04N7/18

CPC分类号： G06T7/001 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.

摘要翻译： 在使用复查SEM执行电路图案的编程点检查时，即使在要检查的电路图案的变化大的情况下，也可以抑制误报的产生而进行稳定的检查。 通过使用评价SEM将预定电路图案顺序成像获得的SEM图像存储在存储单元中。 从存储的SEM图像中选择满足设定条件的图像，并平均以创建平均图像（GP图像）。 通过使用该GP图像通过GP比较进行模式检查，即使当电路图案的变化大时也可以在抑制伪报告的产生的同时执行检查。

公开(公告)号：US06553323B1

公开(公告)日：2003-04-22

申请号：US09661182

申请日：2000-09-13

申请人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

发明人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

IPC分类号： G01B528

CPC分类号： H01L22/20 ,  G01N21/88 ,  G01N2021/8861

摘要： The present invention improves inspection efficiency in detailed inspections of defects performed based on inspection information from a defect inspection. Particles and defects are detected by a defect inspection device 1. If the cause of the particles and defects are to be determined by performing a detailed inspection with a details inspection device 3 using an SEM or the like, attributes are determined on the particles and defects detected by the defects inspection device 1 before the detailed inspection is performed. The attributes are determined with an attribute inspection device using an optical microscope or the like. Based on these attributes, the defects and particles are separated into those that require detailed inspection and those that do not require detailed inspection or that cannot be inspected in detail. A details inspection device 3 is used to inspect the particles and defects requiring detailed inspection.

摘要翻译： 本发明基于来自缺陷检查的检查信息进行的缺陷的详细检查，提高了检查效率。 通过缺陷检查装置1检测颗粒和缺陷。如果通过使用SEM等的细节检查装置3进行详细检查来确定颗粒和缺陷的原因，则根据颗粒和缺陷确定属性 在执行详细检查之前由缺陷检查装置1检测到。 属性由使用光学显微镜等的属性检查装置确定。 基于这些属性，缺陷和颗粒被分成需要详细检查的那些和不需要详细检查或者不能被详细检查的那些。 细节检查装置3用于检查需要详细检查的颗粒和缺陷。

公开(公告)号：US07873205B2

公开(公告)日：2011-01-18

申请号：US10809464

申请日：2004-03-26

申请人： Hirohito Okuda ,  Yuji Takagi ,  Toshifumi Honda ,  Atsushi Miyamoto ,  Takehiro Hirai

发明人： Hirohito Okuda ,  Yuji Takagi ,  Toshifumi Honda ,  Atsushi Miyamoto ,  Takehiro Hirai

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6277 ,  G06K9/6292 ,  G06T2207/30141 ,  G06T2207/30148

摘要： A classification model optimum for realization of a defect classification request by a user is not known by the user. Then, the user sets a classification model which is not necessarily suitable and makes classification, resulting in degradation in classification performance. Therefore, the present invention automatically generates plural potential classification models and combines class likelihoods calculated from the plural classification models to classify. To combine, an index about the adequacy of each model, in other words, an index indicating a reliable level of likelihood calculated from the each potential classification model, is also calculated. Considering the calculated result, the class likelihoods calculated from the plural classification models are combined to execute classification.

摘要翻译： 用户实现缺陷分类请求最优的分类模型是用户不知道的。 然后，用户设置不一定适合的分类模型，进行分类，导致分类性能下降。 因此，本发明自动生成多个潜在分类模型，并且将从多个分类模型计算出的类似度进行分类。 为了组合，还计算了关于每个模型的充分性的指数，换句话说，表示从每个潜在分类模型计算的可靠的似然水平的指数。 考虑到计算结果，将从多个分类模型计算的类似度组合起来进行分类。

公开(公告)号：US20110102573A1

公开(公告)日：2011-05-05

申请号：US12986475

申请日：2011-01-07

申请人： Masaki KURIHARA ,  Toshifumi Honda ,  Ryo Nakagaki

发明人： Masaki KURIHARA ,  Toshifumi Honda ,  Ryo Nakagaki

IPC分类号： H04N7/18 ,  G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817

摘要： A method and apparatus for reviewing defects of a semiconductor device is provided which involves detecting a defect on a SEM image taken at low magnification, and reviewing the defect on a SEM image taken at high magnification, and which can review a lot of defects in a short period of time thereby to improve the efficiency of defect review. In the present invention, the method for reviewing defects of a semiconductor device includes the steps of obtaining an image including a defect on the semiconductor device detected by a detection device by use of a scanning electron microscope at a first magnification, making a reference image from the image including the defect obtained at the first magnification, detecting the defect by comparing the image including the defect obtained at the first magnification to the reference image made from the image including the defect at the first magnification, and taking an image of the detected defect at a second magnification that is larger than the first magnification.

摘要翻译： 提供了一种用于检查半导体器件缺陷的方法和装置，其涉及检测在低放大倍率下拍摄的SEM图像上的缺陷，并且以高倍放大倍数检查SEM图像上的缺陷，并且可以检查在 短时间内可以提高缺陷检查的效率。 在本发明中，用于检查半导体器件的缺陷的方法包括以下步骤：通过使用扫描电子显微镜以第一放大率获得由检测装置检测的半导体器件上的缺陷的图像，从而 所述图像包括在第一放大处获得的缺陷，通过将包括在第一放大获得的缺陷的图像与由包含第一放大率的缺陷构成的图像进行比较的图像进行比较来检测缺陷，并且获取检测到的缺陷的图像 在大于第一放大率的第二放大倍率下。

公开(公告)号：US20060215901A1

公开(公告)日：2006-09-28

申请号：US11311254

申请日：2005-12-20

申请人： Ryo Nakagaki ,  Toshifumi Honda

发明人： Ryo Nakagaki ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of judging criticality or non-flat state of the defect by use of the estimation result. It becomes possible to establish both of a high-throughput image collecting sequence in which any reference image is not acquired and high-precision defect classification, and then to realize both of a high performance classifying function and a high-throughput image collecting function in a defect reviewing apparatus which automatically collects and classifies images of defects existing on a sample of a semiconductor wafer or the like.

摘要翻译： 一种用于检查缺陷的装置，包括具有通过使用缺陷图像来估计存在缺陷的部分的非缺陷状态（参考图像）的功能的图像处理部分（缺陷分类装置部分），以及判断 通过使用估计结果，缺陷的关键性或非平坦状态。 可以建立不获取任何参考图像的高通量图像采集序列和高精度缺陷分类，然后实现高性能分类功能和高吞吐量图像采集功能 缺陷检查装置，其自动地收集和分类存在于半导体晶片等的样本上的缺陷的图像。

公开(公告)号：US08150141B2

公开(公告)日：2012-04-03

申请号：US13183488

申请日：2011-07-15

申请人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

发明人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6256 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

摘要翻译： 在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统 由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。 当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。 分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

公开(公告)号：US08090190B2

公开(公告)日：2012-01-03

申请号：US12695090

申请日：2010-01-27

申请人： Ryo Nakagaki ,  Toshifumi Honda

发明人： Ryo Nakagaki ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of judging criticality or non-flat state of the defect by use of the estimation result. It becomes possible to establish both of a high-throughput image collecting sequence in which any reference image is not acquired and high-precision defect classification, and then to realize both of a high performance classifying function and a high-throughput image collecting function in a defect reviewing apparatus which automatically collects and classifies images of defects existing on a sample of a semiconductor wafer or the like.

摘要翻译： 一种用于检查缺陷的装置，包括具有通过使用缺陷图像来估计存在缺陷的部分的非缺陷状态（参考图像）的功能的图像处理部分（缺陷分类装置部分），以及判断 通过使用估计结果，缺陷的关键性或非平坦状态。 可以建立不获取任何参考图像的高通量图像采集序列和高精度缺陷分类，然后实现高性能分类功能和高吞吐量图像采集功能 缺陷检查装置，其自动地收集和分类存在于半导体晶片等的样本上的缺陷的图像。

公开(公告)号：US07991217B2

公开(公告)日：2011-08-02

申请号：US11704350

申请日：2007-02-09

申请人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

发明人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6256 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

摘要翻译： 在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统 由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。 当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。 分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

公开(公告)号：US20120128233A1

公开(公告)日：2012-05-24

申请号：US13362181

申请日：2012-01-31

申请人： Ryo NAKAGAKI ,  Masaki Kurihara ,  Toshifumi Honda

发明人： Ryo NAKAGAKI ,  Masaki Kurihara ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6256 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

摘要翻译： 在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统 由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。 当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。 分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。