公开(公告)号：US08917452B2

公开(公告)日：2014-12-23

申请号：US13080822

申请日：2011-04-06

申请人： Yuki Ohashi ,  Tomoyuki Kitagawa ,  Naoto Niiya ,  Shinya Oishi

发明人： Yuki Ohashi ,  Tomoyuki Kitagawa ,  Naoto Niiya ,  Shinya Oishi

IPC分类号： G02B5/02 ,  G02F1/1335

CPC分类号： G02B5/0221 ,  G02B5/0205 ,  G02B5/0278 ,  G02F1/133504

摘要： Measurement reference lengths of length and width are set with respect to a convex structure, and an average of vertical distances between tip points and bottom points inside a measurement reference area is calculated as an average height. An average of horizontal distances between the tip points and bottom points is calculated as an average distance. A value obtained by dividing the average height by the average distance provides a gradient ratio. An inverse tangent of the gradient ratio provides an average gradient angle. When the average gradient angle ranges from 5 degrees to 15 degrees and a standard deviation of average gradient angle ranges from 30% to 40% of the average gradient angle, a regular reflectance at a regular reflection angle with respect to incident light of an angle of 30 degrees from a normal direction of the film surface is 1% or less.

摘要翻译： 长度和宽度的测量参考长度相对于凸形结构设置，并且将测量参考区域内的尖点和底点之间的垂直距离的平均值计算为平均高度。 平均距离计算出尖点和底点之间的水平距离的平均值。 通过将平均高度除以平均距离而获得的值提供了梯度比。 梯度比的反正切提供平均梯度角。 当平均梯度角为5度至15度，平均梯度角的标准偏差范围为平均梯度角的30％至40％时，相对于角度为 从膜表面的法线方向30度为1％以下。