专利检索 ap:("Yuval C. Avniel" OR "Peter Mardilovich" OR "Alexander Govyadinov") AND inv:"Yuval C. Avniel" 第 1 页

1.

发明授权
Methods for fabricating three dimensional anisotropic thin films and products produced thereby 失效
标题翻译：制造三维各向异性薄膜的方法及由此制造的产品

公开(公告)号：US06998331B2

公开(公告)日：2006-02-14

申请号：US10394403

申请日：2003-03-21

申请人： Yuval C. Avniel , Peter Mardilovich , Alexander Govyadinov

发明人： Yuval C. Avniel , Peter Mardilovich , Alexander Govyadinov

IPC分类号： H01L21/20

CPC分类号： H01L29/06 , C23C14/0641 , C23C14/165 , C23C14/352 , C23C14/543

摘要： A three dimensional structure comprising at least two materials capable of being deposited by vapor deposition. The structure is fabricated by the controlled vapor deposition of the materials onto a substrate.

摘要翻译： 包括能够通过气相沉积沉积的至少两种材料的三维结构。该结构通过材料的受控气相沉积制成衬底。