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公开(公告)号：US10258948B2
公开(公告)日：2019-04-16
申请号：US15501937
申请日：2015-08-21
Applicant: ZEON CORPORATION
Inventor： Keisuke Ito , Takuya Ishii
Abstract: A nozzle part dropping a slurry and a rotary disk centrifugally spraying the slurry to be dropped from the nozzle part are included. The rotary disk includes a plurality of grooves stretching in a radiation direction at least in a periphery part of a surface on which the slurry is sprayed.
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