公开(公告)号：US08859303B2

公开(公告)日：2014-10-14

申请号：US13466626

申请日：2012-05-08

Applicant: Florin Udrea ,  Julian Gardner ,  Syed Zeeshan Ali ,  Mohamed Foysol Chowdhury ,  Ilie Poenaru

Inventor： Florin Udrea ,  Julian Gardner ,  Syed Zeeshan Ali ,  Mohamed Foysol Chowdhury ,  Ilie Poenaru

IPC: H01L21/00 ,  H05B3/26

CPC classification number: H05B3/267 ,  G01J3/108 ,  H05B2203/032

Abstract: An IR source in the form of a micro-hotplate device including a CMOS metal layer made of at least one layer of embedded on a dielectric membrane supported by a silicon substrate. The device is formed in a CMOS process followed by a back etching step. The IR source also can be in the form of an array of small membranes —closely packed as a result of the use of the deep reactive ion etching technique and having better mechanical stability due to the small size of each membrane while maintaining the same total IR emission level. SOI technology can be used to allow high ambient temperature and allow the integration of a temperature sensor, preferably in the form of a diode or a bipolar transistor right below the IR source.

Abstract translation: 微电子装置形式的IR源，其包括由至少一层嵌入在由硅衬底支撑的电介质膜上的CMOS金属层。 该器件以CMOS工艺形成，随后是背蚀刻步骤。 红外光源还可以是小型膜阵列的形式，由于使用了深反应离子蚀刻技术而被密封包装，并且由于每个膜的小尺寸而具有更好的机械稳定性，同时保持相同的总IR 排放水平。 可以使用SOI技术来允许高环境温度并且允许温度传感器的集成，优选地在IR源的正下方的二极管或双极晶体管的形式。

公开(公告)号：US08410560B2

公开(公告)日：2013-04-02

申请号：US12691104

申请日：2010-01-21

Applicant: Syed Zeeshan Ali ,  Florin Udrea ,  Julian William Gardner

Inventor： Syed Zeeshan Ali ,  Florin Udrea ,  Julian William Gardner

IPC: H01L27/14 ,  H01L21/00

CPC classification number: H05B3/267 ,  Y10T29/49083

Abstract: A micro-hotplate is provided in the form of a device comprising a sensor and one or more resistive heaters within the micro-hotplate arranged to heat the sensor. Furthermore a controller is provided for applying a bidirectional drive current to at least one of the heaters to reduce electromigration. The controller also serves to drive the heater at a substantially constant temperature.

Abstract translation: 提供微电子装置的形式包括传感器和微电热板内的一个或多个电阻加热器，其布置成加热传感器。 此外，提供了一种控制器，用于向至少一个加热器施加双向驱动电流以减少电迁移。 控制器还用于以基本恒定的温度驱动加热器。