公开(公告)号：US06885457B1

公开(公告)日：2005-04-26

申请号：US09365118

申请日：1999-07-30

申请人： Dieter Michel ,  Wolfgang Holzapfel

发明人： Dieter Michel ,  Wolfgang Holzapfel

IPC分类号： G01D5/347 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/34715 ,  G01D5/3473 ,  G01D5/38

摘要： A rotary position measuring system having a housing connected with a scanning unit having a light source that emits beams of light and a detector element. A reflection scanning graduation structure arranged directly on the housing opposite the scanning unit. A graduated disk is connected with a rotatable shaft and has a radial transmission measuring graduation structure, wherein the graduated disk is arranged so it is rotatable around an axis of symmetry in the housing so that the measuring graduation structure is located between the scanning unit and the scanning graduation structure. The beams of light emitted by the light source first reach the measuring graduation structure where they are split into a first set of diffracted partial beams of different orders and the diffracted partial beams impinge on the scanning graduation structure. A second set of diffracted partial beams of different orders results and a back-reflection of the second set of diffracted partial beams in the direction toward the measuring graduation structure results, where the second set of diffracted partial beams interfere with one another and the detection of interfering partial beams takes place by the detector element.

摘要翻译： 一种旋转位置测量系统，其具有与具有发射光束的光源的扫描单元连接的壳体和检测器元件。 反射扫描刻度结构，直接布置在与扫描单元相对的壳体上。 刻度盘与旋转轴连接并具有径向传动测量刻度结构，其中刻度盘被布置为可围绕壳体中的对称轴线旋转，使得测量刻度结构位于扫描单元和扫描单元之间 扫描毕业结构。 由光源发射的光束首先到达测量刻度结构，在那里将它们分成第一组不同阶的衍射部分光束，并且衍射的部分光束照射在扫描刻度结构上。 导致不同阶数的第二组衍射部分光束导致朝向测量刻度结构的方向上的第二组衍射部分光束的反射，其中第二组衍射部分光束彼此干涉，并且检测 干扰的部分光束由检测器元件发生。