Integration of capacitive elements in the form of perovskite ceramic
    1.
    发明授权
    Integration of capacitive elements in the form of perovskite ceramic 有权
    以钙钛矿陶瓷的形式集成电容元件

    公开(公告)号:US07700981B2

    公开(公告)日:2010-04-20

    申请号:US11407681

    申请日:2006-04-20

    CPC classification number: H01L28/55 H01L28/60

    Abstract: The use of a conductive bidimensional perovskite as an interface between a silicon, metal, or amorphous oxide substrate and an insulating perovskite deposited by epitaxy, as well as an integrated circuit and its manufacturing process comprising a layer of an insulating perovskite deposited by epitaxy to form the dielectric of capacitive elements having at least an electrode formed of a conductive bidimensional perovskite forming an interface between said dielectric and an underlying silicon, metal, or amorphous oxide substrate.

    Abstract translation: 使用导电二维钙钛矿作为硅,金属或非晶氧化物衬底之间的界面和通过外延沉积的绝缘钙钛矿,以及集成电路及其制造方法,其包括通过外延沉积的绝缘钙钛矿层以形成 电容元件的电介质至少具有由导电二维钙钛矿形成的电极,其形成在所述电介质和下面的硅,金属或非晶氧化物衬底之间的界面。

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