公开(公告)号：US20120119613A1

公开(公告)日：2012-05-17

申请号：US12946614

申请日：2010-11-15

申请人： Roman C. Gutierrez ,  Robert J. Calvet

发明人： Roman C. Gutierrez ,  Robert J. Calvet

IPC分类号： H02N11/00 ,  H01L21/50

CPC分类号： H02N1/002 ,  G02B7/102 ,  G02B13/0085

摘要： A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.

摘要翻译： 制造致动器装置的方法包括提供包括导电材料层的晶片并在导电材料中形成多个旋转对称的模具，每个模具包括多个径向突出部和互补尺寸的径向凹槽，其以交替方式布置 并且围绕模具的圆周以相等的角度增量。 为了最大化使用可用的晶片空间，芯片以晶片的形式布置在晶片上，其中每个裸片相对于相邻的裸片旋转360度的角度，除以模具上的突片或凹槽的数量的两倍 对于位于晶片的外周的模具，每个模具设置成与相邻模具靠近邻接的边缘到边缘，并且每个模具的每个突片嵌套在相邻模具的互补凹槽内。