公开(公告)号：US06769274B2

公开(公告)日：2004-08-03

申请号：US10033126

申请日：2001-12-26

Applicant: Doo Hee Cho ,  Joon Tae Ahn ,  Min Yong Jeon ,  Kyong Hon Kim

Inventor： Doo Hee Cho ,  Joon Tae Ahn ,  Min Yong Jeon ,  Kyong Hon Kim

IPC: C03B2703

CPC classification number: G02B6/136 ,  C03C21/005 ,  G02B6/1345 ,  G02B2006/12083

Abstract: The present invention relates to a method of manufacturing a waveguide using an ion exchange process. The present invention controls the refractive index and the thickness of a surface layer on a glass substrate using an ion exchange process, forms the waveguide pattern on the surface layer by means of photolithography and etching process and coats with materials having the refractive index same to or lower than that of the glass substrate to form a cladding layer. Accordingly, the present invention can manufacture a planar waveguide, which is excellent in dimension control and reproducibility and has a sharp step wall.

Abstract translation: 本发明涉及使用离子交换法制造波导的方法。 本发明使用离子交换工艺控制玻璃基板上的表面层的折射率和厚度，通过光刻和蚀刻工艺在表面层上形成波导图案，并用与折射率相同或相当于 低于玻璃基板以形成包覆层。 因此，本发明可以制造尺寸控制和再现性优异并且具有尖锐阶梯壁的平面波导。