公开(公告)号：US5864119A

公开(公告)日：1999-01-26

申请号：US746966

申请日：1996-11-18

申请人： Lester H. Vogt ,  Douglas A. Bolton

发明人： Lester H. Vogt ,  Douglas A. Bolton

IPC分类号： B23K1/008 ,  F27B9/06 ,  H01L21/00 ,  E27B9/24 ,  E27B9/36 ,  H01L21/02

CPC分类号： H01L21/67248 ,  B23K1/008 ,  F27B9/066 ,  H01L21/67115 ,  B23K2201/40

摘要： An infrared conveyor furnace with controllable point source radiation elements incorporating a clean room internal environment. The conveyor transports moieties in an indexed manner through multiple heating zones heated by arrays of lamps. The lamps of each array are divided into a plurality of groups which are separately controlled to maintain a constant temperature across the surface of the moiety. The control of the lamp groups is accomplished through the use of a controller utilizing data from FTIR sensors mounted in a fused quartz barrier which is permeable by infrared radiation but which seals the lamp arrays from the heating zones.

摘要翻译： 具有可控点源辐射元件的红外输送炉，结合了洁净室内部环境。 输送机以索引的方式输送通过由灯阵列加热的多个加热区域的部分。 每个阵列的灯被分成多个组，这些组被单独控制，以保持部分表面上的恒定温度。 灯组的控制是通过使用控制器来实现的，所述控制器利用安装在熔融石英屏障中的FTIR传感器的数据，所述传感器可透过红外线辐射但可将灯阵列与加热区密封。