公开(公告)号：US07578228B2

公开(公告)日：2009-08-25

申请号：US11305190

申请日：2005-12-19

申请人： Tomohiko Kawai ,  Kenzo Ebihara

发明人： Tomohiko Kawai ,  Kenzo Ebihara

IPC分类号： F13B13/042

CPC分类号： G01G5/006 ,  Y10S92/02

摘要： An air balance structure that compensates for the weight load of a movable member driven in a straight line along the vertical axis, with a simplified structure and at reduced cost. The box-shaped movable member has an open bottom that accommodates the stationary member therewithin, in which state the movable member is movably supported in the vertical direction by an air bearing created using a gap between the stationary member and the movable member. An air balance chamber that contains pressurized air is formed inside the movable member. After pressure-adjusted air is supplied from the outside to the gap from a jet port through a pipe inside the stationary member, the air flows into the air balance chamber. This flow seals the pressurized air inside the air balance chamber. Pressurized air exhaust is exhausted externally from an exhaust port through a pipe and a flow adjusting device.

摘要翻译： 一种空气平衡结构，其以简单的结构并且以降低的成本补偿沿着垂直轴线以直线驱动的可动构件的重量载荷。 盒状可动构件具有容纳其中的固定构件的敞开的底部，在该状态下，可移动构件通过使用静止构件和可动构件之间的间隙产生的空气轴向在垂直方向上可移动地支撑。 在可动件内部形成有包含加压空气的空气平衡室。 压缩调节后的空气从外部通过静止部件内的管道从喷射口向间隙供给时，空气流入空气平衡室。 该流动将空气平衡室内的加压空气密封。 加压排气从排气口通过管道和流量调节装置从外部排出。