公开(公告)号：US06701633B2

公开(公告)日：2004-03-09

申请号：US10086399

申请日：2002-02-28

申请人： Masaru Ohtsuka

发明人： Masaru Ohtsuka

IPC分类号： G01B5207

CPC分类号： G01B11/007 ,  G01B5/207 ,  G01B11/005 ,  G01B11/245 ,  Y10S33/02

摘要： There is provided a shape measuring apparatus which defines an XYZ-axis coordinate and measures a surface shape of an object, the apparatus including a plurality of probes arranged in a Y-axis direction, the probes contacting a surface of the object, and moving in a Z-axis direction according to the surface shape of the object, a probe holder for holding each of the plurality of probes movable in the Z-axis direction, a moving mechanism for moving the probe holding mechanism in an X-axis direction relative to the object, first and second measuring instruments for measuring positions of each probe in the X-axis and Y-axis directions, a third measuring instrument for measuring a position of each probe in the Z-axis direction; and a computing unit for calculating the surface shape of the object based on measuring results from the first, second, and third measuring instruments.

摘要翻译： 提供了一种形状测量装置，其定义XYZ轴坐标并测量物体的表面形状，该装置包括沿Y轴方向布置的多个探针，探针接触物体的表面，并移动到 根据物体的表面形状的Z轴方向，用于保持能够沿Z轴方向移动的多个探针的探针保持器，用于使探针保持机构沿X轴方向相对移动的移动机构， 用于测量每个探针在X轴和Y轴方向上的位置的第一和第二测量仪器，用于测量每个探针在Z轴方向上的位置的第三测量仪器; 以及基于来自第一，第二和第三测量仪器的测量结果来计算物体的表面形状的计算单元。