公开(公告)号：WO2007143362A2

公开(公告)日：2007-12-13

申请号：PCT/US2007/069176

申请日：2007-05-17

Applicant: SYMPHONY ACOUSTICS, INC. ,  CARR, Dustin, Wade ,  HELM, James, Gilbert

Inventor： CARR, Dustin, Wade ,  HELM, James, Gilbert

CPC classification number: G01B11/02 ,  G01B9/02004 ,  G01B2290/25 ,  G01D5/266 ,  G01H9/00 ,  G01L9/0079 ,  H04R23/008 ,  H04R25/554

Abstract: An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

Abstract translation: 公开了一种从分束器检测多个光束的装置和方法。 本发明的一些实施例特别适用于麦克风，高灵敏度压力传感器，振动传感器和加速度计应用。 本发明的一些实施例产生基于多个检测到的光信号的差分电输出信号。 差分输出信号是响应于诸如压力差或入射声能的环境刺激而产生的。 根据说明性实施例，光学位移传感器通过光学谐振腔将角度偏移重定向到透射光束。 由于角度偏移，重定向的波束（即，重新发射的波束）以在没有环境刺激的情况下对应于重发波束的基本上完全透射率的腔内路径长度来转移空腔。

公开(公告)号：WO2007143362A3

公开(公告)日：2008-04-10

申请号：PCT/US2007069176

申请日：2007-05-17

Applicant: SYMPHONY ACOUSTICS INC ,  CARR DUSTIN WADE ,  HELM JAMES GILBERT

Inventor： CARR DUSTIN WADE ,  HELM JAMES GILBERT

IPC: G01D5/26 ,  H04R23/00

CPC classification number: G01B11/02 ,  G01B9/02004 ,  G01B2290/25 ,  G01D5/266 ,  G01H9/00 ,  G01L9/0079 ,  H04R23/008 ,  H04R25/554

Abstract: An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

Abstract translation: 公开了一种用于检测来自分束器的多个光束的装置和方法。 本发明的一些实施例特别适用于麦克风，高灵敏度压力传感器，振动传感器和加速度计应用。 本发明的一些实施例产生基于多个检测到的光信号的差分电输出信号。 差分输出信号响应于诸如压力差或入射声能的环境刺激而产生。 根据说明性实施例，光学位移传感器将透射的光束以角度偏移重新定向通过光学谐振腔。 由于角度偏移，重定向的光束（即，重新发送的光束）以在不存在环境刺激的情况下对应于重发光束的基本上完全透射率的腔内路径长度来转移空腔。