公开(公告)号：WO2019142006A1

公开(公告)日：2019-07-25

申请号：PCT/GB2019/050163

申请日：2019-01-22

Applicant: UCL BUSINESS PLC

Inventor： DESJARDINS, Adrien ,  FINLAY, Malcolm ,  PAPAKONSTANTINOU, Ioannis ,  MOSSE, Charles Alexander ,  COOTE, Joanne ,  NOIMARK, Sacha ,  ALLES, Erwin

IPC: G01F1/688 ,  A61B5/0215 ,  A61B5/01

CPC classification number: A61B5/0215 ,  A61B5/0066 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/01 ,  A61B5/021 ,  A61B5/02154 ,  A61B5/026 ,  A61B5/0261 ,  A61B5/028 ,  A61B5/061 ,  A61B5/14503 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14551 ,  A61B5/14552 ,  A61B5/205 ,  A61B5/208 ,  A61B5/6852 ,  A61B5/7228 ,  A61B5/7285 ,  A61B8/0841 ,  G01F1/661 ,  G01F1/662 ,  G01F1/6845 ,  G01F1/688 ,  G01F1/6884 ,  G01K11/3206 ,  G01L9/0079 ,  G01L19/04 ,  G01L19/149

Abstract: A sensor is provided for measuring a flow of a fluid in a physiological environment, such as within a vessel of a human or animal subject. The sensor comprises an interrogation light guide extending from a proximal end to a distal end of the sensor. The interrogation light guide is configured to transmit interrogation light to, and receive reflected interrogation light from, the distal end of the sensor. The sensor further comprises an excitation light guide configured to transmit excitation light to the distal end of the sensor. The excitation light is provided for heating the fluid (directly or indirectly). The sensor further comprises a sensing element located at the distal end of the sensor. The sensing element comprises at least two etalons for reflecting interrogation light back along the interrogation light guide towards the proximal end of the sensor. Each etalon has a respective optical path length and further has at least one reflective surface external to the interrogation light guide. The sensing element is configured to be in thermal contact with the fluid such that the optical path length of at least one etalon is dependent on a temperature of the fluid. The reflected interrogation light forms an interferogram which is dependent on the optical path lengths of the respective etalons.

公开(公告)号：WO2012171747A1

公开(公告)日：2012-12-20

申请号：PCT/EP2012/059335

申请日：2012-05-21

Applicant: Endress+Hauser GmbH+Co. KG ,  ZIERMANN, Rene ,  SCHLACHTER, Marc ,  HUMPERT, Axel ,  BROKMANN, Geert ,  WILL, Matthias ,  RÖDER, Ralf ,  CIS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH

Inventor： ZIERMANN, Rene ,  SCHLACHTER, Marc ,  HUMPERT, Axel ,  BROKMANN, Geert ,  WILL, Matthias ,  RÖDER, Ralf

IPC: G01L9/00

CPC classification number: G01L9/0079

Abstract: Eine Druckmesszelle 1 umfasst: einen Membrankörper 9 mit einer Messmembran, mit einen druckabhängig auslenkbaren Bereich; und einen zumindest teilweise transparenten Gegenkörper 2 die unter Bildung einer Messkammer 4 miteinander verbunden sind; sowie zwei im Wesentlichen parallele Reflexionsflächen 12, 14, wobei der auslenkbare Bereich der Messmembran ein biegesteifes Zentrum 10 aufweist, dessen gegenkörperseitige Oberfläche die erste Reflexionsfläche 12 aufweist, wobei der auslenkbare Bereich von einem biegesteifen Randbereich 9 umgeben ist, wobei der auslenkbare Bereich der Messmembran einen verformbaren, dünnen Bereich 8 aufweist, welcher das biegesteife Zentrum umgibt und mit dem Randbereich verbindet, wobei eine zweite, teilreflektierende Reflexionsfläche 14 durch eine der Messmembran zugewandte Oberfläche des Gegenkörpers 2 gebildet wird, wobei die erste Reflexionsfläche durch die zweite Reflexionsfläche hindurch beleuchtbar ist, und wobei der Abstand zwischen den Reflexionsflächen abhängig ist von einer Differenz zwischen einem ersten und einen zweiten Druck auf die Messmembran, die außerhalb bzw. innerhalb der Messkammer herrschen.

Abstract translation: 压力测量单元1包括：具有与压力相关的偏转区中的测量膜片的膜片体9; 和至少部分透明的反体2连接在一起，以形成一个测量室4; 和两个基本平行的反射面12，14，其中，所述测量膜片的偏转区域具有刚性中心10，具有第一反射面12，其中所述可偏转区域由较硬的周边区域9，包围的相对的身体侧表面，其中所述测量膜片一个的偏转区域 具有可变形的薄壁部8，其特征在于，所述刚性中心围绕并与边缘区域，其中，第二部分反射的反射面14由主体2，其中，通过穿过所述第二反射面的第一反射面可以被照亮的测量膜表面的一个面对形成连接，并 其中所述反射表面之间的距离依赖于第一和上普遍存在外部和测量室内部的测量膜片的第二压力之间的差。

公开(公告)号：WO2010139738A1

公开(公告)日：2010-12-09

申请号：PCT/EP2010/057730

申请日：2010-06-02

Applicant: SIMEA OPTIC AB ,  JOHANSSON, Håkan

Inventor： JOHANSSON, Håkan

IPC: G01L9/00 ,  G01L9/04

CPC classification number: G01L9/0079 ,  G01L19/04

Abstract: A fibre optical system for pressure measurement has a pressure sensor element (4) with at least two parallel partially reflecting surfaces (5, 7), one of which is arranged on a diaphragm (6) movable with respect to another fixed said surface as a consequence of pressure differences across said diaphragm. Said surfaces are arranged so as to cause interference phenomena of light inciding substantially perpendicularly onto and reflected by the two surfaces depending upon the actual 10 distance between these surfaces. The pressure sensor element is made of material being stable at a continuous temperature up to at least 800°C. At least said diaphragm (6) of the sensor element is made of Si C, and at least a part (23) of the optical fibre (3) connecting to said sensor element is made of a material able to withstand a continuous temperature of at least 800°C.

Abstract translation: 用于压力测量的光纤光学系统具有压力传感器元件（4），其具有至少两个平行的部分反射表面（5,7），其中一个被布置在相对于另一个固定的所述表面可移动的隔膜（6）上，作为 所述隔膜上的压力差的结果。 所述表面被布置成使得基于这些表面之间的实际10距离，基本上垂直地嵌入两个表面并由其反射的光的干涉现象。 压力传感器元件由在至多800℃的连续温度下稳定的材料制成。 至少所述传感器元件的所述隔膜（6）由Si C制成，并且连接到所述传感器元件的所述光纤（3）的至少一部分（23）由能够承受连续温度的材料制成 至少800°C。

公开(公告)号：WO2008100266A3

公开(公告)日：2009-02-26

申请号：PCT/US2007011954

申请日：2007-05-18

Applicant: NEW JERSEY TECH INST ,  CHIN KEN K ,  FENG GUANHUA ,  ROMAN HARRY

Inventor： CHIN KEN K ,  FENG GUANHUA ,  ROMAN HARRY

IPC: H04R1/02

CPC classification number: G01L9/0079 ,  H04R23/008 ,  H04R31/00 ,  H04R31/003 ,  H04R31/006 ,  H04R2410/00

Abstract: The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9mm x 1.9mm, 2 µ thick SiO2 diaphragm with a 350 µ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 µ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.

Abstract translation: 在本发明中描述了MEMS（微机电系统）法布里 - 珀罗隔膜 - 光纤麦克风的理论，设计，制造和表征。 通过在加工和封装中使用MEMS技术，将一个方形的1.9mm×1.9mm，2μm厚的SiO 2隔膜与350μ方形的压花中心隔离成机械地夹在单模光纤的套管上，以保持其接近（5μ） 并且相对于隔膜垂直取向。 光输出功率与膜上压力的静态测量显示了Fabry-Perot干涉的多于一个周期，从而生成准确再现声音波的法布里 - 珀罗光纤干涉仪。

公开(公告)号：WO2008100266A2

公开(公告)日：2008-08-21

申请号：PCT/US2007/011954

申请日：2007-05-18

Applicant: NEW JERSEY INSTITUTE OF TECHNOLOGY ,  CHIN, Ken, K. ,  FENG, Guanhua ,  ROMAN, Harry

Inventor： CHIN, Ken, K. ,  FENG, Guanhua ,  ROMAN, Harry

IPC: G01B9/02

CPC classification number: G01L9/0079 ,  H04R23/008 ,  H04R31/00 ,  H04R31/003 ,  H04R31/006 ,  H04R2410/00

Abstract: The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9mm x 1.9mm, 2 μ thick SiO 2 diaphragm with a 350 μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.

Abstract translation: 在本发明中描述了MEMS（微机电系统）法布里 - 珀罗隔膜 - 光纤麦克风的理论，设计，制造和表征。 通过在加工和封装中使用MEMS技术，将具有350μm方形压花中心的正方形1.9mm×1.9mm，2μm厚的SiO 2膜片机械地夹紧到单模光纤的套圈 以保持其相对于隔膜的接近度（5μ）和垂直取向。 光输出功率与膜上压力的静态测量显示了Fabry-Perot干扰的多于一个周期，从而生成准确再现声音波的法布里 - 珀罗光纤干涉仪。

公开(公告)号：WO2007143362A3

公开(公告)日：2008-04-10

申请号：PCT/US2007069176

申请日：2007-05-17

Applicant: SYMPHONY ACOUSTICS INC ,  CARR DUSTIN WADE ,  HELM JAMES GILBERT

Inventor： CARR DUSTIN WADE ,  HELM JAMES GILBERT

IPC: G01D5/26 ,  H04R23/00

CPC classification number: G01B11/02 ,  G01B9/02004 ,  G01B2290/25 ,  G01D5/266 ,  G01H9/00 ,  G01L9/0079 ,  H04R23/008 ,  H04R25/554

Abstract: An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

Abstract translation: 公开了一种用于检测来自分束器的多个光束的装置和方法。 本发明的一些实施例特别适用于麦克风，高灵敏度压力传感器，振动传感器和加速度计应用。 本发明的一些实施例产生基于多个检测到的光信号的差分电输出信号。 差分输出信号响应于诸如压力差或入射声能的环境刺激而产生。 根据说明性实施例，光学位移传感器将透射的光束以角度偏移重新定向通过光学谐振腔。 由于角度偏移，重定向的光束（即，重新发送的光束）以在不存在环境刺激的情况下对应于重发光束的基本上完全透射率的腔内路径长度来转移空腔。

公开(公告)号：WO2007109336A2

公开(公告)日：2007-09-27

申请号：PCT/US2007007050

申请日：2007-03-21

Applicant: DAVIDSON INSTR INC

Inventor： BERTHOLD JOHN W ,  COCKING SETH A ,  KAMINSKI WINCENTY A ,  JEFFERS LARRY A ,  LOPUSHANSKY RICHARD L

IPC: G01B9/02

CPC classification number: G01B9/02014 ,  G01B9/02004 ,  G01B9/02023 ,  G01B9/02028 ,  G01B2290/25 ,  G01D5/268 ,  G01D5/35383 ,  G01J3/26 ,  G01K11/3206 ,  G01L9/0079 ,  G01L11/025

Abstract: An apparatus to interrogate one or more fiber optic sensors to make high-resolution measurements at long distances between the sensor and the interrogator apparatus. The apparatus comprises a tunable light source, an optical switch for pulsing the light source, at least one sensor (e.g., a Fabry-Perot sensor) for reflecting the laser light, a fiber optic cable interconnecting the sensor with the light source, a coupler for directing the reflected light from the sensor to a detector in order to generate a digital output, and a control logic for tuning the laser light source based on the digital output from the detector. Use of a fiber Bragg grating temperature sensor is also contemplated.

Abstract translation: 一种用于询问一个或多个光纤传感器以在传感器和询问器装置之间的长距离进行高分辨率测量的装置。 该装置包括可调谐光源，用于脉冲光源的光学开关，用于反射激光的至少一个传感器（例如，法布里 - 珀罗传感器），将传感器与光源互连的光纤电缆，耦合器 用于将来自传感器的反射光引导到检测器以产生数字输出，以及用于基于来自检测器的数字输出调谐激光光源的控制逻辑。 也考虑使用光纤布拉格光栅温度传感器。

公开(公告)号：WO2005033643A2

公开(公告)日：2005-04-14

申请号：PCT/US2004/032090

申请日：2004-10-01

Applicant: SABEUS PHOTONICS, INC. ,  SCHMIDT, Siegmar

Inventor： SCHMIDT, Siegmar

IPC: G01L

CPC classification number: G01L9/0079 ,  G01D5/266 ,  G01L9/0007 ,  G01L11/02

Abstract: A pressure sensor and system for measuring pressure changes, especially in harsh environments, is described. The pressure sensor has a Fabry-Perot optical cavity formed within a tube with a partial reflective mirror provided by an end of an optical fiber and a reflective mirror provided by an end of a plug, with a gap formed between. The pressure sensor may be disposed within a sensing chamber of a housing having an opening into the environment to be monitored. Alternatively, an isolator means may be used to isolate the sensor from the environment while communicating pressure changes to the sensing chamber. In another embodiment, the sensing chamber is filled with a compressible non-flowing material.

Abstract translation: 描述了用于测量压力变化的压力传感器和系统，特别是在恶劣环境中。 压力传感器具有形成在管内的法布里 - 珀罗光腔，其具有由光纤的端部提供的部分反射镜和由插头的端部提供的反射镜，其间形成间隙。 压力传感器可以设置在具有到待监测环境的开口的壳体的感测室内。 或者，可以使用隔离器装置将传感器与环境隔离，同时将感测室的压力变化传递给该传感器。 在另一个实施例中，感测室填充有可压缩的不流动材料。

公开(公告)号：WO2003046498A1

公开(公告)日：2003-06-05

申请号：PCT/NO2002/000355

申请日：2002-10-02

Applicant: SINVENT AS ,  JOHANSEN, Ib-Rune ,  ROGNE, Henrik ,  WANG, Dag ,  FISMEN, Britta, Grennberg ,  AVSET, Berit, Sundby ,  FERBER, Alain ,  BERNSTEIN, Ralph, W.

Inventor： JOHANSEN, Ib-Rune ,  ROGNE, Henrik ,  WANG, Dag ,  FISMEN, Britta, Grennberg ,  AVSET, Berit, Sundby ,  FERBER, Alain ,  BERNSTEIN, Ralph, W.

IPC: G01L9/00

CPC classification number: H04R23/008 ,  G01L9/0079

Abstract: This invention relates to an optical displacement sensor element, e.g. for use in a pressure sensor or a microphone, comprising two essentially flat surfaces being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry-Perot interferometer. Both of said surfaces are at least partially reflective, and in that said first surface is provided with at least one optical detector, and one of surfaces being provided on an at least partially transparent material.

Abstract translation: 本发明涉及一种光学位移传感器元件，例如， 用于压力传感器或麦克风，包括由间隔件限定的空腔分开的两个基本平坦的表面，表面之间的距离是可变的，从而提供位移敏感的法布里 - 珀罗干涉仪。 所述两个表面至少部分地具有反射性，并且所述第一表面设置有至少一个光学检测器，并且其中一个表面设置在至少部分透明的材料上。

公开(公告)号：WO02023148A1

公开(公告)日：2002-03-21

申请号：PCT/US2001/042135

申请日：2001-09-12

IPC: G01L9/00 ,  G01L11/02

CPC classification number: G01L9/0079 ,  G01L9/0077

Abstract: A fiber-optic pressure sensor apparatus includes a section of optical fiber coupled to an interferometer sensor tip having a structure made almost entirely of silicon. The tip structure includes a thin diaphragm bonded to a tip body. The tip body is bell-shaped in a sectional view and includes a curved cross-sectional shape and includes a fiber grip portion which holds a distal end of the optical fiber and a diaphragm support portion to which is bonded the diaphragm. The diaphragm includes a reflective film which is separated from an end surface of the optical fiber to define an interference cavity. The diaphragm deforms or deflects in response to a pressure difference from one side to the other. The movement of the diaphragm alters the optical path length of the interference cavity. The combination of reflections from the two surfaces of the interference cavity provides a standard optical interference signal for measurement by a measurement apparatus.

Abstract translation: 光纤压力传感器装置包括耦合到具有几乎完全由硅制成的结构的干涉仪传感器尖端的光纤部分。 尖端结构包括结合到尖端体的薄膜。 尖端体呈截面图钟形，并且包括弯曲的横截面形状，并且包括保持光纤的远端的纤维夹持部分和粘合隔膜的隔膜支撑部分。 隔膜包括与光纤的端面分离以限定干涉腔的反射膜。 隔膜响应于从一侧到另一侧的压力差而变形或偏转。 光阑的运动改变干涉腔的光程长度。 来自干涉腔的两个表面的反射的组合提供了用于由测量装置测量的标准光学干涉信号。