公开(公告)号：WO2020234150A1

公开(公告)日：2020-11-26

申请号：PCT/EP2020/063606

申请日：2020-05-15

Applicant: SENSIRION AG

Inventor： SALZMANN, Christophe ,  BRAUN, Stephan ,  PUSTAN, David ,  UEHLINGER, Thomas

IPC: G01N21/17 ,  G01N21/03 ,  G01N29/24

Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a component in a gas comprises a substrate (1) and a measurement cell body (2), the substrate (1) and the measurement cell body (2) defining a measurement cell enclosing a measurement volume (3). A reflective shield (17) divides the measurement volume (3) into a first volume (31) and a second volume (32). An opening (4) in the measurement cell is provided for a gas to enter the measurement volume (3). In the first volume (31) and on a front side (11) of the substrate (1) are arranged: An electromagnetic radiation source (7) for emitting electromagnetic radiation (8) through an aperture (18) in the reflective shield (17) into the second volume (32); and a pressure transducer (6) communicatively coupled to the second volume (32) for measuring a sound wave (9) generated by the component in response to an absorption of electromagnetic radiation (8) by the component. At least a portion of a surface (171) of the reflective shield (17) facing the second volume (32) is made of a material reflecting electromagnetic radiation (8).

公开(公告)号：WO2022184553A1

公开(公告)日：2022-09-09

申请号：PCT/EP2022/054716

申请日：2022-02-24

Applicant: SENSIRION AG

Inventor： UEHLINGER, Thomas ,  SALZMANN, Christophe

IPC: G01N21/17 ,  G01N29/24

Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a chemical component in a gas comprises a substrate (1) and a measurement cell body (2) arranged on a first side (11) of the substrate (1). The substrate (1) and the measurement cell body (2) define a measurement cell. A cap (7) is arranged on the first side (11) of the substrate (1) within the measurement cell. The cap (7) and the substrate (1) define a cap volume (71). The cap (7) and the substrate (1) acoustically seal the cap volume (71). A measurement volume (21) is confined by the measurement cell body (2), the substrate (1) and the cap (7). An aperture (23) is provided in the measurement cell for the gas to enter the measurement volume (21). Electrical components are arranged on the first side (11) of the substrate (1) and in the measurement cell. The electrical components comprise at least: An electromagnetic radiation source (4) for emitting electromagnetic radiation (41) into the measurement volume (21); a pressure transducer (3) for measuring a sound wave generated by the chemical component in response to an absorption of the electromagnetic radiation (41) by the chemical component present in the measurement volume (21); and a controller (8) configured to control the electromagnetic radiation source (4). The pressure transducer (3) is arranged outside the cap volume (71) and at least one of the electrical components other than the pressure transducer (3) is arranged in the cap volume (71).