公开(公告)号：WO2014062615A3

公开(公告)日：2014-06-12

申请号：PCT/US2013064939

申请日：2013-10-15

Applicant: UNIV NORTH CAROLINA STATE

Inventor： ESCUTI MICHAEL J ,  MISKIEWICZ MATTHEW N ,  KIM JIHWAN

IPC: G02B5/32

CPC classification number: G02B5/3083 ,  G02B5/3016 ,  G02B5/32 ,  G02B26/101 ,  G02B27/286 ,  G03F7/70191 ,  G03F7/70383 ,  G03F7/70566 ,  G03H1/0248 ,  G03H1/0476 ,  G03H1/08 ,  G03H2001/0478 ,  G03H2222/31 ,  G03H2240/15

Abstract: A direct-write lithography apparatus includes a polarization selector stage configured to vary a polarization orientation angle of light from a light source, a focusing element configured to focus the light from the light source into a spot at a focal plane thereof, and a scanning stage configured to scan the spot in at least two dimensions along a surface of a polarization-sensitive recording medium that is arranged proximate to the focal plane such that neighboring scans substantially overlap. The polarization selector stage and the scanning stage are configured to be operated independently of one another. Related fabrication methods of and optical elements fabricated thereby are also discussed.

Abstract translation: 直接写入光刻设备包括：偏振选择器级，被配置为改变来自光源的光的偏振方向角;聚焦元件，被配置为将来自光源的光聚焦成其焦平面处的光斑;以及扫描级 配置为沿着布置在焦平面附近的偏振敏感记录介质的表面以至少两个维度扫描所述斑点，使得相邻扫描基本重叠。 偏振选择器级和扫描级被配置为彼此独立地操作。 还讨论了由此制造的相关制造方法和光学元件。

公开(公告)号：WO2011014743A3

公开(公告)日：2011-05-19

申请号：PCT/US2010043861

申请日：2010-07-30

Applicant: UNIV NORTH CAROLINA STATE ,  BOULDER NONLINEAR SYSTEMS INC ,  ESCUTI MICHAEL J ,  KIM JIHWAN ,  OH CHULWOO ,  SERATI STEVE

Inventor： ESCUTI MICHAEL J ,  KIM JIHWAN ,  OH CHULWOO ,  SERATI STEVE

IPC: G02B26/08 ,  G02B5/30 ,  G02F1/13

CPC classification number: G02B27/286 ,  G02F1/1347 ,  G02F1/13476 ,  G02F1/292 ,  G02F2001/291 ,  G02F2201/16

Abstract: A beam steering apparatus includes a first beam steering stage and at least a second beam steering stage arranged in-line with the first beam steering stage. The first beam steering stage includes a first polarization grating comprising a uniaxial birefringent material having a first periodic director pattern, and the second beam steering stage includes a second polarization grating comprising a uniaxial birefringent material having a second periodic director pattern. In nonmechanical embodiments, a polarization selector may be arranged to provide a circularly polarized input beam incident on the first polarization grating. In mechanical embodiments, at least one of the first polarization grating and the second polarization grating may be operable to be independently rotated about an azimuth thereof. Related methods of operation are also discussed.

Abstract translation: 光束转向装置包括第一光束转向平台和与第一光束转向平台成一直线设置的至少第二光束操纵台。 第一光束转向平台包括第一偏振光栅，其包括具有第一周期性导向图图案的单轴双折射材料，第二光束转向平台包括具有第二周期性导向图图案的单轴双折射材料的第二偏振光栅。 在非机械实施例中，偏振选择器可以被布置成提供入射在第一偏振光栅上的圆偏振输入光束。 在机械实施例中，第一偏振光栅和第二偏振光栅中的至少一个可以可操作地围绕其方位独立旋转。 还讨论了相关的操作方法。