公开(公告)号：WO2004061889A2

公开(公告)日：2004-07-22

申请号：PCT/US2003/037878

申请日：2003-11-25

Applicant: VARIAN, INC.

Inventor： PERKINS, Charles ,  MANLEY, Barry

IPC: H01J

CPC classification number: H01J41/18

Abstract: An ion pump includes one or more anode pump cells, a cathode positioned in proximity to the one or more anode pump cells and a magnet assembly for producing a magnetic field in the one or more anode pump cells. An electric field is applied between the cathode and the one or more anode pump cells. The magnet assembly includes primary magnets of opposite polarities disposed on opposite ends of the anode pump cells and secondary magnets disposed on opposite sides of the anode pump cells. The magnet assembly may further include a magnet yoke which provides a magnetic flux return path. The magnet assembly produces a substantially uniform axial magnetic field in the one or more anode pump cells.

Abstract translation: 离子泵包括一个或多个阳极泵电池，位于一个或多个阳极泵电池附近的阴极和用于在一个或多个阳极泵电池中产生磁场的磁体组件。 在阴极和一个或多个阳极泵浦电池之间施加电场。 磁体组件包括设置在阳极泵电池的相对两端的相对极性的主磁体和设置在阳极泵电池的相对侧上的次级磁体。 磁体组件还可以包括提供磁通返回路径的磁轭。 磁体组件在一个或多个阳极泵电池中产生基本均匀的轴向磁场。

公开(公告)号：WO00041445A1

公开(公告)日：2000-07-13

申请号：PCT/US1999/027927

申请日：1999-12-10

IPC: F04D19/04 ,  B01J19/08 ,  H01J41/12 ,  H01J41/18 ,  H05H1/54 ,  H05H1/00

CPC classification number: H01J37/32834 ,  H01J41/12 ,  H01J41/18 ,  H05H1/54

Abstract: A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.

Abstract translation: 一种用于从第一到第二区域泵送离子的等离子体泵和方法，所述泵包括具有限定多个导管（30）的通孔的分隔构件; 一组磁体（24），用于提供延伸到导管的磁力; 以及用于产生将离子从管道加速到第二区域的静电场的多个电位源（14）。

公开(公告)号：WO0057451A3

公开(公告)日：2001-02-08

申请号：PCT/EP0002546

申请日：2000-03-17

Applicant: FEI CO

Inventor： MCGINN JAMES B

IPC: H01J41/12 ,  H01J41/18 ,  H01J41/20

CPC classification number: H01J41/18 ,  H01J41/20

Abstract: Diode sputter ion pumps display instabilities like current bursts, leakage currents and arcs typically following pumping exposure to gas doses greater than the ultimate pressure of the vacuum system in which the pump is operating. The instabilities are disruptive to the devices to which the sputter ion pump is attached. The invention provides an ion pump that exhibits improved stability and reduced leakage current. The instabilities are caused by explosive arc emission and electron emission from structures like dendritic protrusions that grow on the cathode plate, whose shape and placement give rise to high electric fields. According to the invention the cathode includes a sputterable material for removing gases from the environment of the ion pump and shaped so that during operation of the ion pump the electric field in a dendritic growth region is insufficient to cause field emission from the dendrites thereby reducing instabilities in the operation of the ion pump.

Abstract translation: 二极管溅射离子泵显示不稳定性，如电流脉冲，漏电流和电弧，通常在泵送暴露于大于泵所在的真空系统的极限压力的气体剂量之后。 不稳定性对溅射离子泵附着的装置是破坏性的。 本发明提供一种表现出改进的稳定性和减小的漏电流的离子泵。 不稳定性是由爆炸性电弧发射和电子发射引起的，其结构如在阴极板上生长的树突状突起，其形状和位置产生高电场。 根据本发明，阴极包括用于从离子泵的环境中除去气体的可溅射材料并成形为使得在离子泵的操作期间，树枝状生长区域中的电场不足以引起来自枝晶的场发射，从而减少不稳定性 在离子泵的运行中。

公开(公告)号：WO1996039582A1

公开(公告)日：1996-12-12

申请号：PCT/IB1996000701

申请日：1996-06-06

Applicant: COLOR PLANAR DISPLAYS, INC.

Inventor： COLOR PLANAR DISPLAYS, INC. ,  ALDERSON, Richard, K.

IPC: F04B37/02

CPC classification number: H01J29/94 ,  F04B37/02 ,  H01J7/16 ,  H01J41/18

Abstract: An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump occupies a space enclosed by a first surface of chamber (1), a second surface of chamber (2), a side of chamber (3), and an optically-opaque shield (4). The small size and integration of the ion pump within the vacuum chamber enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.

Abstract translation: 离子泵允许在抽取相对较小量的功率（微瓦）的同时，连续抽真空小真空室。 在优选实施例中，本离子泵占据由腔室（1）的第一表面，腔室（2）的第二表面，腔室（3）的侧面和光学不透明屏蔽件（4）包围的空间。 离子泵在真空室内的小尺寸和集成使得其中结合有真空室的装置可移动并保持其原始尺寸。

公开(公告)号：WO2015072287A1

公开(公告)日：2015-05-21

申请号：PCT/JP2014/077772

申请日：2014-10-20

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 利根　正純 ,  渡辺　敏光 ,  幕内　雅巳 ,  大西　富士夫

IPC: H01J41/12

CPC classification number: H01J41/18

Abstract: 　真空度に応じて負荷電流と印加電圧とを制御することで低消費電力化かつ小型化したイオンポンプを提供する。　トランス（１０２）１次側に直流電圧を供給する電圧供給部（１０１）と、トランス（１０２）１次側のスイッチング素子（１０４）に電圧パルスを供給するパルス供給部（１１３）と、トランス（１０２）２次側の出力電圧を検出する電圧検出部（１１７）と、トランス（１０２）２次側の負荷電流を検出する電流検出部（１０８）と、前記検出した出力電圧と、前記検出した負荷電流と、前記検出した出力電圧値と負荷電流を乗算して算出した出力電力値のうち少なくともいずれか一つに基づいて、前記パルス供給部（１１３）が出力する電圧パルスのパルス幅またはパルス周期を調整する制御部（１１２）と、を備えるイオンポンプ（２）。

Abstract translation: 提供了一种离子泵，其中负载电流和施加电压根据真空度来控制，以便降低功耗并允许尺寸减小。 离子泵（2）具备：向变压器（102）的初级侧供给直流电压的电压供给部（101）。 用于向变压器（102）的初级侧的开关元件（104）提供电压脉冲的脉冲供给单元（113）; 电压检测单元（117），用于检测变压器（102）的二次侧的输出电压; 电流检测单元（108），用于检测变压器（102）的二次侧的负载电流; 以及控制单元（112），由此脉冲供给单元（113）传送的电压脉冲的脉冲宽度或脉冲周期根据检测到的输出电压，检测到的负载电流和 通过将检测出的输出电压值和负载电流相乘而计算的输出功率值。

公开(公告)号：WO2003058069A2

公开(公告)日：2003-07-17

申请号：PCT/IL2003/000035

申请日：2003-01-14

Applicant: VARCO LTD. ,  ARENSHTAM, Aleksander ,  BENDER, Efim ,  ELIYAHU, Nitzan

Inventor： ARENSHTAM, Aleksander ,  BENDER, Efim ,  ELIYAHU, Nitzan

IPC: F04C

CPC classification number: H01J41/18 ,  H01J41/16

Abstract: An arc vacuum pump which includes a housing, a getter material source, and a plurality of Penning discharge cells. Each Penning cell includes: an anode made of non-ferromagnetic material, a plurality of cathodes of which at least a first cathode has at least one orifice, the orifice dimensioned to channel entering getter material within the electron layer of the cell so that the plasma does not reach the anode. The first cathode is made of a magnetically conductive material. The cell also includes a magnet positioned outside of the housing, proximate to a second cathode. The second cathode is part of the housing wall. A magnet conductor is positioned outside the housing proximate to the magnet and in magnetic communication with the first cathode thereby forming a confining magnetic system with the first cathode and the magnet for confining the discharge of the cell.

Abstract translation: 一种电弧真空泵，其包括壳体，吸气材料源和多个Penning放电单元。 每个Penning单元包括：由非铁磁材料制成的阳极，多个阴极，至少第一阴极具有至少一个孔口，所述孔口的尺寸设置成在电池的电子层内通道进入吸气剂材料，使得等离子体 没有到达阳极。 第一阴极由导磁材料制成。 电池还包括位于壳体外部的磁体，靠近第二阴极。 第二个阴极是外壳壁的一部分。 磁体导体位于外壳附近，靠近磁体并与第一阴极磁连通，从而与第一阴极和磁体形成一个约束磁体，用于限制电池的放电。

公开(公告)号：WO1992021883A1

公开(公告)日：1992-12-10

申请号：PCT/DE1992000409

申请日：1992-05-15

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... ,  HOFMANN, Klaus ,  RICHTER, Axel ,  SANDMAIER, Hermann ,  PLETTNER, Andreas

Inventor： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...

IPC: F04F11/00

CPC classification number: F04F99/00 ,  B05B5/16 ,  G01F1/7088 ,  H01J41/18 ,  H02N11/006

Abstract: A microminiaturized electrostatic pump has at least two spaced apart electrodes (10', 11') and one electrode supporting body (2'). A device for determining the flow rate of a gas or liquid also has at least two spaced apart electrodes (10', 11') and one electrode supporting body (2'). In order to simplify the production of such a device or pump, both electrodes (10', 11') are arranged on the main surfaces of a common electrode supporting body (2') that is insulated from at least one of the two electrodes (10', 11') and is provided with a throughflow opening that is substantially vertical to its main surfaces.

Abstract translation: 微型静电泵具有至少两个间隔开的电极（10'，11'）和一个电极支撑体（2'）。 用于确定气体或液体的流速的装置还具有至少两个间隔开的电极（10'，11'）和一个电极支撑体（2'）。 为了简化这种装置或泵的生产，将两个电极（10'，11'）布置在与两个电极中的至少一个绝缘的公共电极支撑体（2'）的主表面上 10'，11'）并且设置有大致垂直于其主表面的通流开口。

公开(公告)号：WO2004105080A1

公开(公告)日：2004-12-02

申请号：PCT/JP2004/007062

申请日：2004-05-18

Applicant: 株式会社 東芝 ,  清野 和之 ,  嶋田 佳之

Inventor： 清野 和之 ,  嶋田 佳之

IPC: H01J41/12

CPC classification number: H01J41/18 ,  H01J7/16 ,  H01J29/94

Abstract: スパッタイオンポンプは、金属で形成されたポンプ容器（５１）を備え、このポンプ容器内には、互いに対向して配置され陰極（５２）および陽極（５３）と、陰極とポンプ容器内面との間に位置した永久磁石（５７）と、が設けられている。ポンプ容器内に陽極、陰極および磁性材を配置した後、ポンプ容器の外側から磁性材に着磁し永久磁石としている。

Abstract translation: 一种溅射离子泵，包括含有彼此相对设置的阴极（52）和阳极（53）的金属泵容器（51）和位于泵容器的阴极和内表面之间的永磁体（57）。 在阳极之后，阴极和磁性材料布置在泵容器中，泵容器从泵容器的外部被磁化，以形成永磁体。

公开(公告)号：WO01069645A1

公开(公告)日：2001-09-20

申请号：PCT/JP2001/001980

申请日：2001-03-13

IPC: F04B37/02 ,  H01J27/08 ,  H01J41/18 ,  H01J41/20 ,  H01J41/12 ,  H01J37/18

CPC classification number: H01J41/18 ,  H01J27/08 ,  H01J2237/1825

Abstract: A spatter ion pump allowing a pump structure to be simplified with a reduced weight, a magnetic field near a center shaft to be reduced to zero in both radial and axial directions, and a pump attainable pressure to be increased, characterized in that the cylindrical portion of a vacuum chamber wall (1) is formed so as to be in a recessed and projected cross-sectional shape, a permanent magnet (2) is installed in each of outside recessed parts (1a) in the recessed and projected cross-sectional shape in the same magnetic pole direction, an anode electrode (3) is installed in each of inside recessed parts (1b) at the positions apart from the vacuum chamber wall, the cylindrical portion of the vacuum chamber wall is formed as a cathode electrode, a cylindrical magnetic shield member (7) having an exhaust hole is disposed in the vacuum chamber, and a plurality of permanent magnets and a plurality of anode electrodes are disposed at even intervals, respectively.

Abstract translation: 一种飞溅离子泵，其允许以更小的重量简化泵结构，中心轴附近的磁场在径向和轴向方向上减小到零，并且可获得可获得的压力以增加，其特征在于，圆柱形部分 形成为凹凸投影截面形状的真空室壁（1）的永久磁铁（2）以凹入和突出的截面形状安装在每个外凹部（1a）中 在相同的磁极方向上，在离开真空室壁的位置处，在每个内部凹部（1b）中安装阳极电极（3），真空室壁的圆筒部形成为阴极电极 具有排气孔的圆柱形磁屏蔽构件（7）设置在真空室中，并且分别以均匀间隔设置多个永磁体和多个阳极电极。

公开(公告)号：WO00057451A2

公开(公告)日：2000-09-28

申请号：PCT/EP2000/002546

申请日：2000-03-17

IPC: H01J41/12 ,  H01J41/18 ,  H01J41/20

CPC classification number: H01J41/18 ,  H01J41/20

Abstract: Diode sputter ion pumps display instabilities like current bursts, leakage currents and arcs typically following pumping exposure to gas doses greater than the ultimate pressure of the vacuum system in which the pump is operating. The instabilities are disruptive to the devices to which the sputter ion pump is attached. The invention provides an ion pump that exhibits improved stability and reduced leakage current. The instabilities are caused by explosive arc emission and electron emission from structures like dendritic protrusions that grow on the cathode plate, whose shape and placement give rise to high electric fields. According to the invention the cathode includes a sputterable material for removing gases from the environment of the ion pump and shaped so that during operation of the ion pump the electric field in a dendritic growth region is insufficient to cause field emission from the dendrites thereby reducing instabilities in the operation of the ion pump.

Abstract translation: 二极管溅射离子泵显示出不稳定性，如电流脉冲，漏电流和电弧，通常在泵送暴露于大于泵所在的真空系统的极限压力的气体剂量之后。 这些不稳定性对溅射离子泵附着的装置是破坏性的。 本发明提供一种表现出改进的稳定性和减小的漏电流的离子泵。 不稳定性是由于阴极板上生长的树突状突起等结构的爆炸电弧发射和电子发射引起的，其形状和位置产生高电场。 根据本发明，阴极包括用于从离子泵的环境中除去气体的可溅射材料，并成形为使得在离子泵的操作期间，树枝状生长区域中的电场不足以引起来自枝晶的场发射，从而减少不稳定性 在离子泵的操作中。