公开(公告)号：WO2002073322A1

公开(公告)日：2002-09-19

申请号：PCT/US2002/007486

申请日：2002-03-12

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  HARRIS, Richard, S. ,  SUN, Yunlong

Inventor： SUN, Yunlong

IPC: G05B15/00

CPC classification number: B23K26/382 ,  B23K2203/50 ,  H05K3/0026 ,  H05K3/0038

Abstract: A quasi-CW diode- or lamp-pumped, A-O Q-switched solid-state UV laser system (10) synchronizes timing of the quasi-CW pumping with movement of the positioning system (36) to reduce pumping while the positioning system (36) is moving from one target area (31) to the next target area (31) to form multiple vias in a substrate at a high throughput. Thus, the available UV power for via formation is higher even though the average pumping power to the laser medium (16), and thermal loading of the laser pumping diodes (14), remains the same as that currently available through conventional CW pumping with conventionally available laser pumping diodes (14). The quasi-CW pumping current profile can be further modified to realize a preferred UV pulse amplitude profile.

Abstract translation: 准CW二极管或灯泵浦的AO Q开关固态紫外激光系统（10）使准CW泵浦的定时与定位系统（36）的运动同步，以减少定位系统（36）的泵送 ）从一个目标区域（31）移动到下一个目标区域（31），以在高通量下在衬底中形成多个通孔。 因此，即使通过激光介质（16）的平均泵浦功率和激光泵浦二极管（14）的热负载仍然保持与通过传统CW泵浦现有可用的通常形式的可用UV功率相同 可用的激光泵浦二极管（14）。 可以进一步修改准CW泵浦电流分布，以实现优选的UV脉冲幅度分布。