IMPEDANCE-SCANNING QUARTZ CRYSTAL MICROBALANCE
    61.
    发明申请
    IMPEDANCE-SCANNING QUARTZ CRYSTAL MICROBALANCE 审中-公开
    阻抗扫描石英微尺度

    公开(公告)号:WO2009060100A2

    公开(公告)日:2009-05-14

    申请号:PCT/EP2008065248

    申请日:2008-11-10

    CPC classification number: G01G3/13 G01G3/16

    Abstract: Disclosed is a method for detecting a change in weight by means of an impedance-scanning quartz crystal microbalance that can be coupled to an evaluation device. The quartz crystal microbalance is designed to transmit the measurement points recorded at a predetermined data recording rate as raw data to the evaluation device. Said method comprises at least the following steps: the measurement points of the raw data are linearly adjusted to a fractional-rational function; and at least one resonant frequency is determined from the adjusted measurement points of the raw data, a change in the at least one resonant frequency corresponding to an effective change in weight.

    Abstract translation: 一种用于检测具有阻抗扫描石英晶体微量天平,其可耦合到评估装置,其中,所述石英晶体微量天平被配置为将在一个预定的数据记录速率作为原始数据到评价装置所采取的测量点的质量变化的方法,包括至少以下步骤:线性调整所述原始数据的测量点 有理函数,并确定原始数据的调整的测量点中的至少一个谐振频率,其中的改变对应于一个有效的质量变化的至少一个共振频率。

    検出センサ
    62.
    发明申请
    検出センサ 审中-公开
    检测传感器

    公开(公告)号:WO2007148522A1

    公开(公告)日:2007-12-27

    申请号:PCT/JP2007/061170

    申请日:2007-06-01

    CPC classification number: G01G3/16 G01N5/02

    Abstract:  振動子の高感度化を図ることのできる技術を提供することを目的とする。  センサの振動子20に、ブリッジ51を介し、物質が付着または吸着するプラットフォーム50を機械的に結合して設ける。そして、プラットフォーム50上に付着または吸着した物質の質量が、あたかもプラットフォーム50が振動子20に接続された箇所に集中的に付着または吸着しているかのように作用させることで、センサの感度を向上させる。プラットフォーム50は、ブリッジ51を介し、振動子20と一体的に振動するような箇所に接続するのが好ましく、これには、振動子20において、r方向またはθ方向のいずれか一方のみに振動が生じる部位に、ブリッジ51を介してプラットフォーム50を機械的に結合するのが好ましい。

    Abstract translation: 提供了一种提高振荡器灵敏度的技术。 用于粘附或吸附物质的平台(50)通过桥接器(51)将平台机械耦合到传感器的振荡器(20)上来布置。 然后,通过允许平台(50)上的粘附或吸附物质的质量如同该物质以集中的方式粘附或吸附在平台(50)连接到的区域 振荡器(20)。 平台(50)优选地连接到通过桥(51)与振荡器(20)一体振荡的区域,并且对于这种连接,平台(50)优选地通过桥接机械地耦合到振荡器(20) (51),在仅在r方向产生振荡的部分或 方向。

    QCMセンサーを用いる熱硬化膜中の昇華物の測定方法
    63.
    发明申请
    QCMセンサーを用いる熱硬化膜中の昇華物の測定方法 审中-公开
    用QCM传感器测定热敏电影片中的亚液的方法

    公开(公告)号:WO2007111147A1

    公开(公告)日:2007-10-04

    申请号:PCT/JP2007/055240

    申请日:2007-03-15

    Inventor: 広井 佳臣

    Abstract: A thermoset film formed on a silicon wafer (16) is heated with a heat source (8) disposed under the silicon wafer (16). During the heating, a sublimate from the thermoset film is allowed to flow together with an air stream ascending toward an upper part in an enclosure (2) covering the thermoset film. The air stream directly adheres to a crystal oscillator (4) due to a nozzle (5) inserted into a detection part (3) disposed in the course of the air stream. Thus, the amount of the sublimate is measured in a real-time manner with respect to the lapse of heating time.

    Abstract translation: 形成在硅晶片(16)上的热固性膜被设置在硅晶片(16)下方的热源(8)加热。 在加热期间,允许来自热固性膜的升华物与在覆盖热固性膜的外壳(2)中朝向上部上升的空气流一起流动。 由于插入到设置在空气流中的检测部分(3)中的喷嘴(5),气流直接粘附到晶体振荡器(4)。 因此,相对于经过加热时间,实时地测量升华量。

    質量測定方法および質量測定用圧電振動片の励振回路並びに質量測定装置
    64.
    发明申请
    質量測定方法および質量測定用圧電振動片の励振回路並びに質量測定装置 审中-公开
    质量测量方法,用于质量测量的压电式振动片的电路和质量测量仪器

    公开(公告)号:WO2004085976A1

    公开(公告)日:2004-10-07

    申请号:PCT/JP2004/004103

    申请日:2004-03-24

    Inventor: 小林 祥宏

    CPC classification number: G01N5/02 G01G3/16 G01N11/16

    Abstract: 質量の測定を確実に行なえるようにする。 質量測定装置10は、圧電振動片12を強制励振する励振回路14を有する。励振回路14は、PLL回路20を備えている。PLL回路20は、電圧制御発振回路24が励振信号を出力する。励振信号は、分配器22を介して圧電振動片12および位相比較器26に与えられる。位相比較器26は、圧電振動片12の出力信号と励振信号との位相差に応じた信号を出力する。この信号は、ループフィルタ28を通過して直流電圧にされ、電圧制御発振器24に制御電圧として与えられる。電圧制御発振器24は、制御電圧に応じて発振周波数が変化し、圧電振動子12の出力信号と位相差を生じない励振信号を出力し、圧電振動片12を共振させる。信号処理部16は、電圧制御発振器24の出力周波数を計数して圧電振動片12の共振周波数を求める。

    Abstract translation: 质量测量准确进行。 质量测量仪(10)具有用于强制激励压电振动片(12)的激励电路(14)。 励磁电路(14)具有PLL电路(20)。 PLL电路(20)具有输出激励信号的压控振荡电路(24)。 励磁信号通过分配器(22)馈送到压电振动片(12)和相位比较器(26)。 相位比较器26输出与压电振动片12的输出信号和激励信号之间的相位差对应的信号。 该信号通过一个环路滤波器(28),以转换成一个直流电压,并给予一个压控振荡器(24)作为控制电压。 压控振荡器(24)以与控制电压变化的频率振荡,并输出与压电振动片(12)的输出信号无相位差的励磁信号,以使压电振动片(12)共振。 信号处理部(16)对压控振荡器(24)的输出频率进行计数,以确定压电振动片(12)的谐振频率。

    STRING WEIGHT SENSOR
    65.
    发明申请
    STRING WEIGHT SENSOR 审中-公开
    STRING重量传感器

    公开(公告)号:WO2003046492A1

    公开(公告)日:2003-06-05

    申请号:PCT/IB2001/002281

    申请日:2001-11-26

    CPC classification number: G01L1/103 G01G3/16 G01L1/106

    Abstract: Application: the invention can be utilized within an automated system of control of the technological process of single crystal growth. Essence of the Invention: two boards are placed under a hermetic casing; one of them rotates along with the weight sensor, as the other remains static. An optoelectronic couple (that contains an LED and a phototransistor that are placed coaxially) is placed on top fo the boards. Signal is transmitted to the comptuer via the aforementioned optoelectronic couple. Technical outcome: by utilizing the string weight, higher measuring precision and higher sensibility (that allows automated crystal growth from a seedcrystal) can be achieved.

    Abstract translation: 应用:本发明可以在单晶生长工艺过程的自动控制系统中使用。 发明的本质:将两个板放置在密封的壳体下方; 其中一个与重量传感器一起旋转,因为另一个保持静止。 将光电耦合(包含同轴放置的LED和光电晶体管)放置在板的顶部。 信号通过上述光电耦合传输到电容器。 技术成果:通过利用线重,可以实现更高的测量精度和更高的灵敏度(允许种子晶体自动晶体生长)。

    SYSTEM AND METHOD FOR RESONANT FILTER MASS MONITORING
    66.
    发明申请
    SYSTEM AND METHOD FOR RESONANT FILTER MASS MONITORING 审中-公开
    用于共振滤波器质量监测的系统和方法

    公开(公告)号:WO1994007121A1

    公开(公告)日:1994-03-31

    申请号:PCT/US1993008615

    申请日:1993-09-10

    CPC classification number: G01N5/00 G01G3/16 G01N15/0618

    Abstract: A system for measuring particulate concentrations includes a mass sensing device (10). Mass sensing device (10) has a sensing chamber (16) with an intake port (12) and an output port (30). Sensing chamber (16) is divided into an upper portion (14) and a lower portion (18) by a filter membrane (20) which is a planar, peripherally supported filter for entrapping the particulates. The system further features harmonic excitation driver (24) for oscillating the filter perpendicular to its planar surface and a sensor (27) for measuring the frequency of oscillation.

    Abstract translation: 用于测量颗粒浓度的系统包括质量感测装置(10)。 质量感测装置(10)具有带有进气口(12)和输出端口(30)的检测室(16)。 传感室(16)通过过滤膜(20)被分成上部(14)和下部(18),过滤膜(20)是用于捕获微粒的平面的外围支撑的过滤器。 该系统还具有用于使滤波器垂直于其平面表面振荡的谐波激励驱动器(24)和用于测量振荡频率的传感器(27)。

    METHOD AND DEVICE FOR MEASURING DYNAMIC LOAD
    67.
    发明申请
    METHOD AND DEVICE FOR MEASURING DYNAMIC LOAD 审中-公开
    用于测量动态负载的方法和装置

    公开(公告)号:WO1993005374A1

    公开(公告)日:1993-03-18

    申请号:PCT/JP1991001168

    申请日:1991-08-31

    CPC classification number: G01G3/12 G01G3/16 G01G21/24 G01G23/06

    Abstract: A method and a device for measuring a load in a dynamic state in which variations such as shaking and vibration occur. With a spring system composing member fixed at one end and made free at the other end, a load is applied to the free end for measuring instantaneous displacement Yi and indirectly measuring a static load We from the equation (a), where Wi = instantaneous load; g = gravitational acceleration; DELTA g(A/L)i = acceleration of the free end obtained from differentiation of displacement Yi performed twice, and k = spring constant. When variations such as shaking and vibration occur in the base for fixing the spring system composing member, a static load We is measured by the use of the equation (b), where DELTA g(G/L)i = acceleration of variation occurring in the base.

    Abstract translation: 一种用于测量动态的负载的方法和装置,其中发生振动和振动等变化。 通过弹簧系统组成部件固定在一端并在另一端自由,向自由端施加负载以测量瞬时位移Yi并间接地测量静载荷We来自等式(a),其中Wi =瞬时负载 ; g =重力加速度; DELTA g(A / L)i =由位移的微分获得的自由端的加速度进行两次,k =弹簧常数。 当在用于固定弹簧系统构成构件的基座中发生振动和振动等变化时,通过使用等式(b)测量静载荷We,其中DELTA g(G / L)i =发生在 的基地。

    DISPLACEMENT DETECTOR, ESPECIALLY DISPLACEMENT TO FREQUENCY TRANSDUCER FOR MEASURING PRESSURE
    68.
    发明申请
    DISPLACEMENT DETECTOR, ESPECIALLY DISPLACEMENT TO FREQUENCY TRANSDUCER FOR MEASURING PRESSURE 审中-公开
    位移检测器,用于测量压力的频率传感器的特别位移

    公开(公告)号:WO1991013327A1

    公开(公告)日:1991-09-05

    申请号:PCT/HU1991000008

    申请日:1991-02-19

    CPC classification number: G01G3/16 G01L1/10 G01L1/14 G01L9/0008 G01L9/0011

    Abstract: In a displacement detector, especially a displacement to frequency transducer for measuring pressure, comprising an oscillator (30) with a resilient vibrating reed (15) and signal processing means, the oscillator (30) including inductance members (20, 20') remaining in magnetic coupling, the resilient vibrating reed (15) comprises at least a first and a second leg (5, 5') connected by a coupling member (12) made of a ferromagnetic material, the first leg (5) being free for a displacement ( DELTA x) according to a pressure or other force causing this displacement ( DELTA x), the second leg (5') being fixed, the oscillator (30) including a first inductance member (20) determining a spacing (3) for receiving the coupling member (12), a second inductance member (20') for following the changes of the magnetic coupling between the coupling member (12) and the first inductance member (20), wherein the first and second inductance members (20, 20') are connected to means, especially an operational amplifier (IC1) for generating signals, particularly square wave signals of frequency corresponding to the displacement ( DELTA x).

    Abstract translation: 在位移检测器中,特别是用于测量压力的位移到频率换能器,包括具有弹性振动片(15)的振荡器(30)和信号处理装置,所述振荡器(30)包括保持在 弹性振动片(15)至少包括通过由铁磁材料制成的联接构件(12)连接的第一和第二腿部(5,5'),所述第一腿部(5)可自由移位 (DELTA x)根据导致该位移(DELTA x)的压力或其他力,第二腿(5')被固定,振荡器(30)包括确定用于接收的间隔(3)的第一电感构件(20) 联接构件(12),用于跟随联接构件(12)和第一电感构件(20)之间的磁耦合的变化的第二电感构件(20'),其中第一和第二电感构件(20,20) ')连接到手段,特别是操作 用于产生信号的nal放大器(IC1),特别是对应于位移(DELTA x)的频率的方波信号。

    OSCILLATING WIRE TRANSDUCER FOR MEASURING STRESSES, ELONGATIONS AND FORCES
    69.
    发明申请
    OSCILLATING WIRE TRANSDUCER FOR MEASURING STRESSES, ELONGATIONS AND FORCES 审中-公开
    用于测量应力,伸缩和扭矩的振弦传感器

    公开(公告)号:WO1988008520A1

    公开(公告)日:1988-11-03

    申请号:PCT/HU1987000022

    申请日:1987-04-27

    CPC classification number: G01B7/16 G01G3/16 G01L1/10

    Abstract: A transducer for measuring stresses, elongations and forces, has a wire made of electrically conductive material which is secured under tension at two points electrically insulated from each other. The central region of the wire is arranged in a uniform magnetic field and the two points of attachment are connected electrically to a converter (10) with negative impedance which, together with the wire (1), is connected in an oscillating circuit. The frequency of vibration of the oscillator depends on the quantity to be measured, for example the stress.

    Abstract translation: 用于测量应力,伸长率和力的传感器具有由导电材料制成的导线,该导线在彼此电绝缘的两个点处被张紧地固定。 导线的中心区域布置成均匀的磁场,并且两个附接点电连接到具有负阻抗的转换器(10),其与线(1)一起连接在振荡电路中。 振荡器的振动频率取决于待测量,例如应力。

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