摘要:
Le procédé de l'invention comprend la formation sur une couche de SiOxFy, d'une couche protectrice de silice SiO2 et/ou d'un oxyde métallique par dépôt en phase vapeur sous assistance ionique, consistant ô bombarder la couche en formation avec un faisceau d'ions positifs formés ô partir d'un gaz rare, d'oxygène ou d'un mélange de deux ou plus de ces gaz ou par pulvérisation cathodique d'une couche de silicium ou de métal suivie d'une étape d'oxydation de la couche de silicium ou de métal. Application ô la réalisation de revêtements antireflets.
摘要:
An inexpensive article imparted with a hard coat having contamination-proof performance and lubricity and exhibiting excellent scratch resistance and wear resistance, and a method for forming a hard coat. To the surface of an article (1) to be hard coated, a hard coat agent composition containing a cationic polymerization curing compound is applied to form a hard coat agent composition layer. On the surface of the hard coat agent composition layer, a surface material layer material containing a cationic polymerization curing compound having contamination-proof and/or lubricating function is formed to form a surface material layer. The hard coat agent composition layer or the surface material layer is irradiated with an active energy beam or both layers are thermally cured to form a hard coat layer (2) touching the surface of the article (1) and a contamination-proof surface layer (3) touching the surface of the hard coat (2).
摘要:
A method for fabricating an optical element having excellent heat resistance and exhibiting excellent adhesion to a substrate. The optical element is fabricated by sticking a liquid composition for forming an optical element to the forming surface of a basic material having a patterned surface, arranged regularly with high wettability areas and low wettability areas, as the forming surface and then forming protrusions in the high wettability areas by hardening the composition. The composition for forming an optical element contains at least one kind of compound selected from a condensable hydrolytic compound or a hydrolytic condensate thereof.
摘要:
A diffusely reflecting material adapted to resist contamination. The material is preferably a layer of expanded PTFE with a transparent barrier layer of PFA or FEP, for example, disposed on it. If contamination does occur, the material is adapted to be cleaned and restored substantially to its original reflectance.
摘要:
The invention describes a process for improving the durability of porous antireflective surfaces without significantly effecting the percent reflectance of the coated surface. The process includes the steps of applying and curing a "compatible" coating composition to the porous antireflective surface and applying and curing a hydrophobic coating composition to the cured "compatible" coating. The "compatible" coating composition contains at least one tetraalkyl orthosilicate, at least one metal oxide sol and optionally a catalyst. The hydrophobic coating composition comprises an amorphous fluoropolymer, perfluoroalkyl organosilane and solvent.
摘要:
Die Erfindung betrifft ein optisches Element (1) zur Reflexion von EUV- Strahlung (4), umfassend: ein Substrat (2), eine auf dem Substrat (2) gebildete Beschichtung (3) zur Reflexion von EUV-Strahlung (4), wobei die Beschichtung (3) eine Deckschicht (6) mit einer dem Substrat (2) abgewandten Oberfläche aufweist. Zumindest an der Oberfläche der Deckschicht (6) ist eine Oberflächenstruktur gebildet, die Nanostrukturen aufweist, wobei die Nanostrukturen als säulenartige Nanostrukturen ausgebildet sind oder es sich bei den Nanostrukturen um Nanofasern handelt, die ein faserartiges Netzwerk bilden.