公开(公告)号：WO02095308A3

公开(公告)日：2003-03-06

申请号：PCT/US0205801

申请日：2002-02-25

Applicant: IGC POLYCOLD SYSTEMS INC ,  APPARAO TAMIRISA V V R ,  PODTCHERNIAEV OLEG ,  FLYNN KEVIN P ,  HALL PAUL ,  LACHENBRUCH ROGER ,  BOIARSKI MIKHAIL

Inventor： APPARAO TAMIRISA V V R ,  PODTCHERNIAEV OLEG ,  FLYNN KEVIN P ,  HALL PAUL ,  LACHENBRUCH ROGER ,  BOIARSKI MIKHAIL

IPC: F25D17/06 ,  F25B1/00 ,  F25B5/04 ,  F25B7/00 ,  F25B9/00 ,  F25D16/00 ,  F25B41/00

CPC classification number: F25B7/00 ,  F25B9/006 ,  F25D2400/28

Abstract: Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.

Abstract translation: 公开了一种超低温双压缩机（114,144）循环气体冷却系统，其包括与闭环气体二次制冷回路（112）组合的闭环混合制冷剂初级制冷系统（110）。 所公开的超低温双压缩机（114,144）再循环气体冷却系统能够提供连续的长期冷却气体并且快速冷却高温或环境温度物体（158），例如用于处理半导体晶片的卡盘 或任何此类设备。 燃气冷冻系统的特征在于三种操作模式：正常冷却模式，烘烤模式和后烘箱冷却模式。

公开(公告)号：WO2005072404A3

公开(公告)日：2007-07-26

申请号：PCT/US2005002729

申请日：2005-01-28

Applicant: BROOKS AUTOMATION INC ,  FLYNN KEVIN P ,  BOIARSKI MIKHAIL ,  PODTCHERNIAEV OLEG

Inventor： FLYNN KEVIN P ,  BOIARSKI MIKHAIL ,  PODTCHERNIAEV OLEG

IPC: F25J1/00 ,  C09K5/00 ,  C09K5/04 ,  F25B7/00 ,  F25B9/00 ,  F25J1/02

CPC classification number: F25B9/006 ,  C09K5/041 ,  C09K2205/106 ,  C09K2205/13 ,  C09K2205/132 ,  F25B7/00

Abstract: The disclosure is directed to a cooling system that includes a first refrigerant cycle and a second refrigerant cycle. The first refrigerant cycle has a first refrigerant and the second refrigerant cycle has a second refrigerant comprising a mixture of cryogenic components. The disclosure is also directed to a cooling system that includes a first refrigerant cycle and a second refrigerant cycle. The first refrigerant cycle has a first refrigerant. The second refrigerant cycle has a second refrigerant comprising a non-reactive component. The second refrigerant is free of fluorocarbons, chlorofluorocarbons, and hydrocarbons. At least a portion of the second refrigerant is condensed in the second refrigerant cycle.

Abstract translation: 本公开涉及包括第一制冷剂循环和第二制冷剂循环的冷却系统。 第一制冷剂循环具有第一制冷剂，第二制冷剂循环具有包含低温组分的混合物的第二制冷剂。 本公开还涉及包括第一制冷剂循环和第二制冷剂循环的冷却系统。 第一制冷剂循环具有第一制冷剂。 第二制冷剂循环具有包含非反应性组分的第二制冷剂。 第二制冷剂不含碳氟化合物，氯氟烃和碳氢化合物。 第二制冷剂的至少一部分在第二制冷剂循环中冷凝。

公开(公告)号：WO2006042015A1

公开(公告)日：2006-04-20

申请号：PCT/US2005/035986

申请日：2005-10-05

Applicant: HELIX TECHNOLOGY CORPORATION ,  BOIARSKI, Mikhail ,  PODTCHERNIAEV, Oleg ,  FLYNN, Kevin, P.

Inventor： BOIARSKI, Mikhail ,  PODTCHERNIAEV, Oleg ,  FLYNN, Kevin, P.

IPC: F28F27/02 ,  F28D9/00 ,  F25B39/00

CPC classification number: F25B7/00 ,  F25B9/006 ,  F25B39/00 ,  F25B40/00 ,  F25B45/00 ,  F25B2400/0403 ,  F25B2400/23 ,  F28D9/005 ,  F28F9/028 ,  Y10T29/49359

Abstract: The heat exchanger (500) includes a fluid inlet manifold (502), a fluid outlet manifold (508), a plurality of heat transfer channels (504) configured to communicate with the fluid inlet manifold (502) and the fluid outlet manifold (508), and packing (510) located within the fluid inlet manifold (502).

Abstract translation: 热交换器（500）包括流体入口歧管（502），流体出口歧管（508），多个传热通道（504），其配置成与流体入口歧管（502）和流体出口歧管（508）连通 ）和位于流体入口歧管（502）内的填料（510）。

公开(公告)号：WO2007092204A3

公开(公告)日：2007-08-16

申请号：PCT/US2007/002518

申请日：2007-01-31

Applicant: BROOKS AUTOMATION, INC. ,  FLYNN, Kevin, P. ,  BOIARSKI, Mikhail ,  PODTCHERNIAEV, Oleg

Inventor： FLYNN, Kevin, P. ,  BOIARSKI, Mikhail ,  PODTCHERNIAEV, Oleg

IPC: F25B9/00 ,  F25B40/00 ,  F25B47/02

Abstract: Refrigerant freezeout is prevented, and temperature is controlled, by the use of a controlled bypass flow that causes a warming of the lowest temperature refrigerant in a refrigeration system that achieves very low temperatures by using a mixture of refrigerants comprising at least two refrigerants with boiling points that differ by at least 50°C. This control capability enables reliable operation of the very low temperature system.

公开(公告)号：WO2002095308A2

公开(公告)日：2002-11-28

申请号：PCT/US2002/005801

申请日：2002-02-25

Applicant: IGC POLYCOLD SYSTEMS, INC. ,  APPARAO, Tamirisa, V., V., R. ,  PODTCHERNIAEV, Oleg ,  FLYNN, Kevin, P. ,  HALL, Paul ,  LACHENBRUCH, Roger ,  BOIARSKI, Mikhail

Inventor： APPARAO, Tamirisa, V., V., R. ,  PODTCHERNIAEV, Oleg ,  FLYNN, Kevin, P. ,  HALL, Paul ,  LACHENBRUCH, Roger ,  BOIARSKI, Mikhail

IPC: F25J

CPC classification number: F25B7/00 ,  F25B9/006 ,  F25D2400/28

Abstract: Disclosed is an ultra-low temperature, dual-compressor, recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system in combination with a closed-loop gas secondary refrigeration loop. The ultra-low temperature, dual-compressor, recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object, such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.

Abstract translation: 公开了一种超低温双压缩机（114,144）循环气体冷却系统，其包括与闭环气体二次制冷回路（112）组合的闭环混合制冷剂初级制冷系统（110）。 所公开的超低温双压缩机（114,144）再循环气体冷却系统能够提供连续的长期冷却气体并且快速冷却高温或环境温度物体（158），例如用于处理半导体晶片的卡盘 或任何此类设备。 燃气冷冻系统的特征在于三种操作模式：正常冷却模式，烘烤模式和后烘箱冷却模式。

公开(公告)号：WO2007092204A2

公开(公告)日：2007-08-16

申请号：PCT/US2007002518

申请日：2007-01-31

Applicant: BROOKS AUTOMATION INC ,  FLYNN KEVIN P ,  BOIARSKI MIKHAIL ,  PODTCHERNIAEV OLEG

Inventor： FLYNN KEVIN P ,  BOIARSKI MIKHAIL ,  PODTCHERNIAEV OLEG

CPC classification number: F25B9/006 ,  F25B40/00 ,  F25B47/006 ,  F25B47/022 ,  F25B2400/04 ,  F25B2400/13 ,  F25B2400/23 ,  F25B2600/2515

Abstract: Refrigerant freezeout is prevented, and temperature is controlled, by the use of a controlled bypass flow that causes a warming of the lowest temperature refrigerant in a refrigeration system that achieves very low temperatures by using a mixture of refrigerants comprising at least two refrigerants with boiling points that differ by at least 50°C. This control capability enables reliable operation of the very low temperature system.

Abstract translation: 通过使用受控的旁路流动来防止制冷剂脱气，并且通过使用包含至少两种具有沸点的制冷剂的制冷剂的混合物来实现非常低的温度的制冷系统中的最低温度制冷剂的升温来控制温度 差别在至少50°C。 这种控制能力使得极低温系统能够可靠运行。