公开(公告)号：WO2006064990A1

公开(公告)日：2006-06-22

申请号：PCT/KR2004/003329

申请日：2004-12-17

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHEUNG, Wan-sup ,  LIM, Jong-yeon ,  CHUNG, Kwang-hwa ,  LEE, Soo-gab

Inventor： CHEUNG, Wan-sup ,  LIM, Jong-yeon ,  CHUNG, Kwang-hwa ,  LEE, Soo-gab

IPC: G06F11/30

CPC classification number: G05B23/0232 ,  F04D19/04 ,  F04D27/001

Abstract: The present invention such as active diagnostic algorithms is developed not only to realize the early detection of degraded vacuum pumps for the protection of pump failure but also to provide their predictive maintenance. According to the present invention, it is possible to find simple and effective ways to deal with technical problems arising from the large variability of the pump-by-pump operation characteristics and the multiple process conditions where pumps run under the idle operation and gas-loaded operation conditions alternately, especially in semiconductor manufacturing process.

Abstract translation: 开发了诸如主动诊断算法的本发明不仅实现了用于保护泵故障的降级真空泵的早期检测，而且提供了它们的预测维护。 根据本发明，可以找到简单有效的方式来处理由泵泵操作特性的大变化引起的技术问题以及泵在怠速运行和气体负载下运行的多个工艺条件 操作条件交替，特别是在半导体制造过程中。

公开(公告)号：WO2006064991A1

公开(公告)日：2006-06-22

申请号：PCT/KR2004/003330

申请日：2004-12-17

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHEUNG, Wan-sup ,  LIM, Jong-yeon ,  CHUNG, Kwang-hwa ,  LEE, Soo-gab

Inventor： CHEUNG, Wan-sup ,  LIM, Jong-yeon ,  CHUNG, Kwang-hwa ,  LEE, Soo-gab

IPC: G06F11/30

CPC classification number: G05B23/0283

Abstract: According to the present invention, the most challenging issues in this work have been to find systematic ways of enabling maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment result. Further, the comparison of the currently evaluated diagnostics analysis results and the initial (or reference) data set is shown to enable maintenance engineers to decide the replacement of the considered vacuum pump according to the evaluated pump performance indicators. This quantitative diagnostic analysis result is expected not only to enable maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment results but also to improve the reliability and confidence of the predictive maintenance of low vacuum pumps.

Abstract translation: 根据本发明，这项工作中最具挑战性的问题是找到系统的方法，使维护工程师能够根据其目前的性能评估结果来确定更换真空泵的足够时间。 此外，显示了当前评估的诊断分析结果与初始（或参考）数据集的比较，使得维护工程师能够根据评估的泵性能指标来决定更换所考虑的真空泵。 这种定量诊断分析结果不仅可以使维护工程师根据其当前的性能评估结果来确定更换真空泵的足够时间，而且还可以提高低真空泵预测性维护的可靠性和可靠性。