公开(公告)号：WO2011025850A1

公开(公告)日：2011-03-03

申请号：PCT/US2010/046728

申请日：2010-08-26

Applicant: CORNING INCORPORATED ,  CORNELL, Jim, D. ,  SANSON, Mark, C.

Inventor： CORNELL, Jim, D. ,  SANSON, Mark, C.

IPC: G02B13/14 ,  G02B13/16 ,  G02B15/173

CPC classification number: G02B13/14 ,  G02B13/16 ,  G02B15/173

Abstract: A mid infrared spectral band continuous zoom system is described herein that can provide a continuous zoom range with a focal length change greater than 25X when thermally imaging a distant object. In addition, a method is described herein for using the mid infrared spectral band continuous zoom system to thermally image the distant object.

Abstract translation: 本文描述了中红外光谱带连续变焦系统，其可以在对远距离物体进行热成像时提供焦距变​​化大于25X的连续变焦范围。 此外，本文描述了使用中红外光谱带连续变焦系统对远处物体进行热成像的方法。

公开(公告)号：WO2010005491A1

公开(公告)日：2010-01-14

申请号：PCT/US2009/003795

申请日：2009-06-25

Applicant: CORNING INCORPORATED ,  CORNELL, Jim, D. ,  MALACH, Joseph, D. ,  MICHALOSKI, Paul, F. ,  WEBB, James, E.

Inventor： CORNELL, Jim, D. ,  MALACH, Joseph, D. ,  MICHALOSKI, Paul, F. ,  WEBB, James, E.

IPC: G03F7/20 ,  G02B13/22 ,  G02B27/00

CPC classification number: G03F7/70191 ,  G02B13/22 ,  G02B27/0043 ,  G02B27/4222

Abstract: A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.

Abstract translation: 将远心校正器结合到微光刻投影系统中以在微光刻投影系统的输出处实现远心度目标。 远心校正器位于投影系统的照明器和投影透镜之间，优选地恰好在用于控制照射光罩的光的角分布的掩模版之前。