TUNABLE SPECTRAL FILTERS
    4.
    发明申请

    公开(公告)号:WO2021118870A1

    公开(公告)日:2021-06-17

    申请号:PCT/US2020/063248

    申请日:2020-12-04

    Abstract: A tunable spectral filter comprising a phase change material is incorporated into a multilayered dielectric structure. The dielectric permittivity, and thus the filter properties, of the structure can be modified by producing a change in the phase change material, e.g., causing a metal- insulator transition. By controllably causing such a change in the dielectric permittivity of the phase change material, the spectral transmittance and reflectance of the structure, and thus its filter properties, can be modified to provide a predetermined transmittance or reflectance of electromagnetic radiation incident on the structure. In preferred embodiments, the phase change material layer is a vanadium dioxide (VO2) film formed by atomic layer deposition (ALD).

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