公开(公告)号：WO2005031228A1

公开(公告)日：2005-04-07

申请号：PCT/GB2004/003888

申请日：2004-09-10

Applicant: THE BOC GROUP PLC ,  LEE, Ron, Clark ,  HARRISON, Colin, Michael ,  GREENWOOD, Joanne, Rachel ,  KANEKO, Makoto ,  MENNIE, Darren

Inventor： LEE, Ron, Clark ,  HARRISON, Colin, Michael ,  GREENWOOD, Joanne, Rachel ,  KANEKO, Makoto ,  MENNIE, Darren

IPC: F25J1/00

CPC classification number: B82Y10/00 ,  F25J1/0005 ,  F25J1/0222 ,  F25J1/0276 ,  F25J2205/20 ,  F25J2210/42 ,  F25J2215/36 ,  G03F7/70033 ,  G03F7/70858 ,  H05G2/006

Abstract: Apparatus for producing liquid or solid xenon comprises a duct (12) having an inlet (14) for receiving gaseous xenon and an outlet (16) for outputting gaseous xenon at a reduced temperature to a nozzle located in a vacuum chamber (60). A housing (18) extends about the duct and contains a halocarbon coolant in thermal contact with the duct, and a second duct (24) in thermal contact with the halocarbon coolant for conveying a flow of liquid nitrogen through the housing (18) to control the temperature of the halocarbon. In view of the difference in the pressure of the xenon gas output from the duct and the pressure in the chamber, the thus-cooled gas is caused to liquefy or solidify in the vicinity of the nozzle.

Abstract translation: 用于生产液体或固体氙的装置包括具有用于接收气态氙的入口（14）的管道（12）和用于将降低温度的气态氙输送到位于真空室（60）中的喷嘴的出口（16）。 壳体（18）围绕管道延伸并且包含与管道热接触的卤代烃冷却剂和与卤烃冷却剂热接触的第二管道（24），用于将液氮流通过壳体（18）以控制 卤化碳的温度。 鉴于从管道输出的氙气体的压力和室内的压力的差异，使得如此冷却的气体在喷嘴附近液化或固化。

公开(公告)号：WO2005031168A1

公开(公告)日：2005-04-07

申请号：PCT/GB2004/003975

申请日：2004-09-16

Applicant: THE BOC GROUP PLC ,  MENNIE, Darren ,  LEE, Ron, Clark ,  GRANT, Robert, Bruce ,  BREWSTER, Barrie, Dudley ,  GREENWOOD, Joanne, Rachel

Inventor： MENNIE, Darren ,  LEE, Ron, Clark ,  GRANT, Robert, Bruce ,  BREWSTER, Barrie, Dudley ,  GREENWOOD, Joanne, Rachel

IPC: F04D19/04

CPC classification number: F04D19/04 ,  F04D17/168 ,  F25J3/0685 ,  F25J2205/20 ,  F25J2215/36

Abstract: A vacuum pumping system comprises a first gas supply for supplying a first gas, such as xenon, to a vacuum chamber. A pump, receives the gas output from the chamber. A second gas supply supplies a purge gas, such as nitrogen or helium, for pumping with the first gas. A gas separator receives the pumped gases exhausted by the pump, and recovers the first gas and the purge gas from the stream. The recovered first gas is recirculated through the vacuum chamber, and the recovered second gas is recirculated through at least the pump.

Abstract translation: 真空泵系统包括用于将第一气体（例如氙）供应到真空室的第一气体供应。 一个泵，接收从腔室输出的气体。 第二气体供应源供应吹扫气体，例如氮气或氦气，用于与第一气体泵送。 气体分离器接收由泵排出的泵送的气体，并从流中回收第一气体和净化气体。 回收的第一气体通过真空室再循环，并且回收的第二气体至少通过泵再循环。

公开(公告)号：WO2004086610A3

公开(公告)日：2004-10-07

申请号：PCT/GB2004/001198

申请日：2004-03-19

Applicant: THE BOC GROUP PLC ,  GREENWOOD, Joanne, Rachel ,  KETTLEWELL, Nathan, Lee ,  DEAN, Julian, Richard ,  KENDALL, John, Spencer

Inventor： GREENWOOD, Joanne, Rachel ,  KETTLEWELL, Nathan, Lee ,  DEAN, Julian, Richard ,  KENDALL, John, Spencer

IPC: B01D8/00

Abstract: A dry pump (10) has adjacent its inlet (12) and between the inlet and pump foreline (14) an apparatus for abating the back flow of organic molecules originating from a lubricant used to lubricate a drive mechanism of the pump. In one embodiment, the apparatus comprises a first compartment (18) having extending from its internal wall a plurality of cooling baffle plates (20). The cooling baffle plates are cooled by means of a water-cooling coil (22). Between the first compartment (18) and the foreline (14) is a second compartment 24 having extending from its internal wall a plurality of interleaved baffles (26). These baffles are coated on their surfaces with activated charcoal pellets for adsorbing halocarbon molecules back-streaming from the pump inlet.

公开(公告)号：WO2004086610A2

公开(公告)日：2004-10-07

申请号：PCT/GB2004001198

申请日：2004-03-19

Applicant: BOC GROUP PLC ,  GREENWOOD JOANNE RACHEL ,  KETTLEWELL NATHAN LEE ,  DEAN JULIAN RICHARD ,  KENDALL JOHN SPENCER

Inventor： GREENWOOD JOANNE RACHEL ,  KETTLEWELL NATHAN LEE ,  DEAN JULIAN RICHARD ,  KENDALL JOHN SPENCER

IPC: B01D8/00 ,  B01D39/20 ,  F04B37/08 ,  H03F3/00

CPC classification number: F04B37/08 ,  B01D8/00 ,  B01D39/2051 ,  B01D39/2055

Abstract: A dry pump (10) has adjacent its inlet (12) and between the inlet and pump foreline (14) an apparatus for abating the back flow of organic molecules originating from a lubricant used to lubricate a drive mechanism of the pump. In one embodiment, the apparatus comprises a first compartment (18) having extending from its internal wall a plurality of cooling baffle plates (20). The cooling baffle plates are cooled by means of a water-cooling coil (22). Between the first compartment (18) and the foreline (14) is a second compartment 24 having extending from its internal wall a plurality of interleaved baffles (26). These baffles are coated on their surfaces with activated charcoal pellets for adsorbing halocarbon molecules back-streaming from the pump inlet.

Abstract translation: 干泵（10）在其入口（12）附近并且在入口和泵前级管线（14）之间具有用于减弱源自用于润滑泵的驱动机构的润滑剂的有机分子的回流的设备。 在一个实施例中，该设备包括具有从其内壁延伸多个冷却挡板（20）的第一隔室（18）。 冷却挡板通过水冷盘管（22）冷却。 在第一隔室（18）和前级管线（14）之间是第二隔室24，其具有从其内壁延伸的多个交错挡板（26）。 这些挡板在其表面上涂有活性炭颗粒以吸收从泵入口回流的卤化碳分子。