AN APPARATUS FOR REMOVING PARTICLES
    1.
    发明申请
    AN APPARATUS FOR REMOVING PARTICLES 审中-公开
    一种去除颗粒的装置

    公开(公告)号:WO1989004628A1

    公开(公告)日:1989-06-01

    申请号:PCT/SE1988000631

    申请日:1988-11-18

    CPC classification number: A47L7/0009 A47L7/0042 A47L9/02

    Abstract: The invention relates to an apparatus for removing, by partial vacuum, particles, liquids etc. from a substrate (7). The apparatus includes a connection conduit (3) which is common to a plurality of channels (5a, 5b, 5c, etc.), and distributes partial vacuum to the one ends of the channels (5a, 5b, 5c, etc.), the conduit being arranged to be connected (at 4) to a source of partial vacuum establishing requisite partial vacuum at the one ends of the channels (5a, 5b, 5c, etc.). The other ends of the channels (5a, 5b, 5c, etc.) are obliquely inclined in relation to that substrate (7), from which material is to be removed, for the purpose of retaining the other ends of the channels (5a, 5b, 5c, etc.) open against the substrate (7) on abutment thereagainst, at least that space between said other ends and substrate which is hereby created being bridged by a suitably somewhat resilient portion (2a) which is arranged to seal from the other ends of the channels (5a, 5b, 5c, etc.) against the substrate (7).

    Abstract translation: 本发明涉及一种用于通过部分真空从基板(7)去除颗粒,液体等的装置。 该装置包括与多个通道(5a,5b,5c等)相同的连接管道(3),并将部分真空分配到通道(5a,5b,5c等)的一端, 管道被布置成在通道(5a,5b,5c等)的一端处被连接(在4处)到部分真空源,建立必要的部分真空。 通道(5a,5b,5c等)的另一端相对于要去除材料的基板(7)倾斜倾斜,以便将通道(5a,5b,5c等)的另一端 5b,5c等)在基板(7)上相对于基板(7)开口,至少在此产生的所述另一端和基板之间的空间由适当稍微有些弹性的部分(2a)桥接,该部分布置成从 通道(5a,5b,5c等)的另一端抵靠基板(7)。

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