公开(公告)号：WO2004068454A3

公开(公告)日：2005-03-24

申请号：PCT/US2004001067

申请日：2004-01-14

Applicant: DRS SENSORS & TARGETING SYS ,  IONESCU ADRIAN C ,  HOWARD PHILIP EARL

Inventor： IONESCU ADRIAN C ,  HOWARD PHILIP EARL

IPC: G01J5/00 ,  G01J5/20 ,  G09G20060101 ,  G09G1/00 ,  H01L27/146 ,  H01L31/02

CPC classification number: H01L27/14669 ,  G01J5/20

Abstract: A pixel structure (10), which forms one element of a focal plane array, includes a bolometer having a detector (20) and an insulator (14). The detector (20) is made from a material that absorbs incident thermal radiation and has an electrical resistance that varies in response to changes in the temperature of the material. The insulator (14) has a plurality of serpentine legs disposed completely underneath die detector (20) so that insulator (14) extends between the detector (20) and the substrate (12). And the insulator (14) supports the detector (20) in a spaced-apart relationship with respect to the substrate (12) to thermally isolate the detector (10) from the substrate (12). To further improve the performance of the bolometer, the bolometer includes a resonant layer (18) between the detector (10) and the insulator (14). The resonant layer is disposed such that areas defined between the detector (20) and the resonant layer (18), and between the resonant layer (18) and the insulator (14), form first and second resonant cavities, respectively.

Abstract translation: 形成焦平面阵列的一个元件的像素结构（10）包括具有检测器（20）和绝缘体（14）的辐射热计。 检测器（20）由吸收入射热辐射的材料制成，并具有响应材料温度变化而变化的电阻。 绝缘体（14）具有完全设置在管芯检测器（20）下方的多个蛇形腿，使得绝缘体（14）在检测器（20）和衬底（12）之间延伸。 并且绝缘体（14）相对于衬底（12）以间隔开的关系支撑检测器（20），以将检测器（10）与衬底（12）热隔离。 为了进一步提高测辐射热谱仪的性能，测辐射热计包括在检测器（10）和绝缘体（14）之间的谐振层（18）。 谐振层被设置成使得限定在检测器（20）和谐振层（18）之间以及谐振层（18）和绝缘体（14）之间的区域分别形成第一和第二谐振腔。

公开(公告)号：WO2004068454A2

公开(公告)日：2004-08-12

申请号：PCT/US2004/001067

申请日：2004-01-14

Applicant: DRS SENSORS & TARGETING SYSTEMS, INC. ,  IONESCU, Adrian, C. ,  HOWARD, Philip, Earl

Inventor： IONESCU, Adrian, C. ,  HOWARD, Philip, Earl

IPC: G09G

CPC classification number: H01L27/14669 ,  G01J5/20

Abstract: A pixel structure, which forms one element of a focal plane array, includes a bolometer having a detector and an insulator. The detector that is made from a material that absorbs incident thermal radiation and has an electrical resistance that varies in response to change in the temperature of the material. The insulator has a plurality of serpentine legs disposed completely underneath the detector so that the insulator extends between the detector and the substrate. And the insulator supports the detector in a spaced-apart relationship with respect to the substrate to thermally isolate the detector from the substrate. To further improve the performance of the bolometer, the bolometer includes a resonant layer between the detector and the insulator. The resonant layer is disposed such that areas defined between the detector and the resonant layer, and between the resonant layer and the insulator, form first and second resonant cavities, respectively.

Abstract translation: 形成焦平面阵列的一个元件的像素结构包括具有检测器和绝缘体的测辐射热计。 由吸收入射的热辐射并具有响应于材料的温度变化而变化的电阻的材料制成的检测器。 绝缘体具有完全设置在检测器下方的多个蛇形腿，使得绝缘体在检测器和衬底之间延伸。 并且绝缘体相对于衬底以间隔开的关系支撑检测器，以将检测器与衬底隔离。 为了进一步提高测辐射热谱仪的性能，测辐射热计包括检测器和绝缘体之间的谐振层。 谐振层被设置成使得限定在检测器和谐振层之间以及谐振层和绝缘体之间的区域分别形成第一和第二谐振腔。