公开(公告)号：WO2007053569A1

公开(公告)日：2007-05-10

申请号：PCT/US2006/042360

申请日：2006-10-31

Applicant: MKS INSTRUMENTS, INC. ,  NAGARKATTI, Siddharth, P. ,  KISHINEVSKY, Michael ,  SHAJII, Ali ,  KALVAITIS, Timothy, E. ,  MCKINNEY, William, S. ,  GOODMAN, Daniel ,  HOLBER, William, M. ,  SMITH, John, A.

Inventor： NAGARKATTI, Siddharth, P. ,  KISHINEVSKY, Michael ,  SHAJII, Ali ,  KALVAITIS, Timothy, E. ,  MCKINNEY, William, S. ,  GOODMAN, Daniel ,  HOLBER, William, M. ,  SMITH, John, A.

IPC: H03H7/40

CPC classification number: H03H7/40

Abstract: A system (200) and method are provided for delivering power to a dynamic load (260). The system includes a power supply (210) providing DC power having a substantially constant power open loop response, a power amplifier (220) for converting the DC power to RF power, a sensor (240) for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system (250, 252) to modify the impedance of the power amplifier to at least a substantially matched impedance of the dynamic load (260), and a controller (230) for controlling the electrically controllable impedance matching system (200). The system (200) further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module (252) for determining power delivered to the dynamic load, (260) and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

Abstract translation: 提供了一种用于将功率传递给动态负载（260）的系统（200）和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源（210），用于将DC功率转换成RF功率的功率放大器（220），用于测量DC功率的电压，电流和相位角的传感器（240） 与RF功率相关联的电压和电流矢量;将电力可控阻抗匹配系统（250,252）修改成至少动态负载（260）的基本上匹配的阻抗的功率放大器的阻抗;以及控制器（230） 用于控制电可控阻抗匹配系统（200）。 所述系统（200）还包括用于确定由所述功率放大器输出的功率的传感器校准测量模块，用于确定输送到所述动态负载的功率的电子匹配系统校准模块（252）和用于计算功率的功率耗散模块 消耗在电可控阻抗匹配系统中。