公开(公告)号：WO2012059912A1

公开(公告)日：2012-05-10

申请号：PCT/IL2011/000319

申请日：2011-04-14

Applicant: RAMOT AT TEL-AVIV UNIVERSITY LTD. ,  MAROM, Emanuel ,  KONFORTI, Naim ,  MILGROM, Benjamin

Inventor： MAROM, Emanuel ,  KONFORTI, Naim ,  MILGROM, Benjamin

IPC: G01M11/02 ,  G03F9/00

CPC classification number: G01M11/0264

Abstract: A template (6) suitable for characterizing an optical system is disclosed. The template has at least one alternating brightness pattern (62) along a pair of orthogonal directions (64, 66) over at least a portion of the template, wherein for each direction of the pair a period characterizing the alternating brightness pattern along the direction is positive and being either constant or monotonic in a non- random manner.

Abstract translation: 公开了一种适于表征光学系统的模板（6）。 模板在模板的至少一部分上具有沿着一对正交方向（64,66）的至少一个交替亮度图案（62），其中对于该对的每个方向，表征沿该方向的交替亮度图案的周期是 以非随机方式为正，并且为常数或单调。