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公开(公告)号：WO2022179680A1
公开(公告)日：2022-09-01
申请号：PCT/EP2021/054490
申请日：2021-02-24
Applicant: IMEC VZW , SCREEN HOLDINGS CO., LTD.
Inventor： PACCO, Antoine , TEPPEI, Nakano
IPC: H01L21/3213 , C23F1/00
Abstract: The disclosure relates to a method for etching a molybdenum feature, comprising the steps of: a) oxidizing a thickness portion of the molybdenum feature using a thermal oxidation process to form a thermal molybdenum oxide layer, and b) dissolving the thermal molybdenum oxide layer using a wet chemistry.
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