公开(公告)号：WO2009113961A1

公开(公告)日：2009-09-17

申请号：PCT/SG2008/000077

申请日：2008-03-11

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH ,  KUMAR, RAKESH ,  SUBRAMANIAM, BALAKUMER ,  RANGANATHAN, NAGARAJAN ,  LI, HONG YU

Inventor： KUMAR, RAKESH ,  SUBRAMANIAM, BALAKUMER ,  RANGANATHAN, NAGARAJAN ,  LI, HONG YU

IPC: H01L27/00 ,  H01L31/00

CPC classification number: G02B6/122 ,  G02B6/12004 ,  G02B6/136 ,  G02B6/30 ,  H01L27/1203

Abstract: A method for reducing optical coupling loss in a dielectric stack, a dielectric stack, and an optical device. The method comprises the steps of removing at least a portion of the dielectric stack associated with one or more metal layers of the dielectric stack in a region where optical losses are to be eliminated; and replacing said portion with a homogenous dielectric material.

Abstract translation: 一种用于减小电介质堆叠，电介质堆叠和光学装置中的光耦合损耗的方法。 该方法包括以下步骤：在要消除光损耗的区域中去除与电介质叠层的一个或多个金属层相关联的电介质叠层的至少一部分; 并用均匀的电介质材料代替所述部分。