公开(公告)号：WO2010088592A2

公开(公告)日：2010-08-05

申请号：PCT/US2010/022716

申请日：2010-02-01

Applicant: APPLIED MATERIALS, INC. ,  CLARK, Daniel, O. ,  DICKINSON, Colin, John ,  JUNG, Jay, J. ,  BROWN, Daniel, Stephan ,  MOALEM, Mehran ,  HOOSHDARAN, Frank, F. ,  FARNIA, Morteza ,  PAGE, Barry ,  SYPHERD, Gary ,  DAHM, Jonathan ,  CHANDLER, Phil

Inventor： CLARK, Daniel, O. ,  DICKINSON, Colin, John ,  JUNG, Jay, J. ,  BROWN, Daniel, Stephan ,  MOALEM, Mehran ,  HOOSHDARAN, Frank, F. ,  FARNIA, Morteza ,  PAGE, Barry ,  SYPHERD, Gary ,  DAHM, Jonathan ,  CHANDLER, Phil

IPC: B01D53/78 ,  B01D47/00

CPC classification number: B01D47/027 ,  B01D47/06 ,  B01D53/185 ,  B01D53/40 ,  B01D53/78 ,  B01D2251/604 ,  B01D2251/80 ,  B01D2258/0216

Abstract: Embodiments of an abatement apparatus are disclosed herein. In some embodiments, an abatement apparatus may include a scrubber configured to receive an effluent stream from a process chamber and further configured to remove first particles from the effluent stream; a scrubber conduit coupled to the scrubber to receive the effluent stream therefrom and configured to remove second particles from the effluent stream, the scrubber conduit having one or more inlets configured to provide a fluid to sufficiently wet an interior surface of the scrubber conduit to trap the second particles thereon and to wash the second particles therealong; and a central scrubber coupled to the scrubber via the scrubber conduit. In some embodiments, the scrubber conduit is downward sloping from the scrubber to the central scrubber. In some embodiments, a plurality of scrubbers may be coupled to the central scrubber via a plurality of scrubber conduits.

Abstract translation: 本文公开了减排设备的实施例。 在一些实施例中，减量装置可以包括洗涤器，该洗涤器构造成接收来自处理室的流出物流并且还被配置为从流出物流中去除第一颗粒; 洗涤器导管，所述洗涤器导管连接至所述洗涤器以接收来自所述洗涤器的流出物流并配置成从所述流出物流移除第二颗粒，所述洗涤器导管具有一个或多个入口，所述入口构造成提供流体以充分湿润所述洗涤器导管的内表面， 第二颗粒在其上并沿其洗涤第二颗粒; 以及通过洗涤器导管连接到洗涤器的中央洗涤器。 在一些实施例中，洗涤器导管从洗涤器向中央洗涤器向下倾斜。 在一些实施例中，多个洗涤器可以通过多个洗涤器导管连接到中心洗涤器。

公开(公告)号：WO2010088592A3

公开(公告)日：2010-11-04

申请号：PCT/US2010022716

申请日：2010-02-01

Applicant: APPLIED MATERIALS INC ,  CLARK DANIEL O ,  DICKINSON COLIN JOHN ,  JUNG JAY J ,  BROWN DANIEL STEPHAN ,  MOALEM MEHRAN ,  HOOSHDARAN FRANK F ,  FARNIA MORTEZA ,  PAGE BARRY ,  SYPHERD GARY ,  DAHM JONATHAN ,  CHANDLER PHIL

Inventor： CLARK DANIEL O ,  DICKINSON COLIN JOHN ,  JUNG JAY J ,  BROWN DANIEL STEPHAN ,  MOALEM MEHRAN ,  HOOSHDARAN FRANK F ,  FARNIA MORTEZA ,  PAGE BARRY ,  SYPHERD GARY ,  DAHM JONATHAN ,  CHANDLER PHIL

IPC: B01D53/78 ,  B01D47/00

CPC classification number: B01D47/027 ,  B01D47/06 ,  B01D53/185 ,  B01D53/40 ,  B01D53/78 ,  B01D2251/604 ,  B01D2251/80 ,  B01D2258/0216

Abstract: Embodiments of an abatement apparatus are disclosed herein. In some embodiments, an abatement apparatus may include a scrubber configured to receive an effluent stream from a process chamber and further configured to remove first particles from the effluent stream; a scrubber conduit coupled to the scrubber to receive the effluent stream therefrom and configured to remove second particles from the effluent stream, the scrubber conduit having one or more inlets configured to provide a fluid to sufficiently wet an interior surface of the scrubber conduit to trap the second particles thereon and to wash the second particles therealong; and a central scrubber coupled to the scrubber via the scrubber conduit. In some embodiments, the scrubber conduit is downward sloping from the scrubber to the central scrubber. In some embodiments, a plurality of scrubbers may be coupled to the central scrubber via a plurality of scrubber conduits.

Abstract translation: 减轻装置的实施例在此公开。 在一些实施例中，减排装置可以包括洗涤器，其构造成从处理室接收流出物流，并进一步构造成从排出物流中除去第一颗粒; 洗涤器管道，其耦合到洗涤器以接收来自其的流出物流，并被配置为从流出物流中除去第二颗粒，洗涤器管道具有一个或多个入口，其配置成提供流体以充分地润湿洗涤器管道的内表面， 第二颗粒在其上并在其上洗涤第二颗粒; 以及通过洗涤器管道耦合到洗涤器的中央洗涤器。 在一些实施例中，洗涤器导管从洗涤器向下倾斜到中央洗涤器。 在一些实施例中，多个洗涤器可以经由多个洗涤器管道耦合到中央洗涤器。