公开(公告)号：WO2002088018A3

公开(公告)日：2002-11-07

申请号：PCT/US2002/003679

申请日：2002-02-07

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： GOETZ, Douglas, P. ,  HAMERLY, Michael, E. ,  PENDERGRASS, Daniel, B., Jr. ,  SMITH, Robert, G. ,  THEISS, Silva, K. ,  WEAVER, Billy, L.

IPC: B81B3/00

Abstract: A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

公开(公告)号：WO2002088018A2

公开(公告)日：2002-11-07

申请号：PCT/US2002/003679

申请日：2002-02-07

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： GOETZ, Douglas, P. ,  HAMERLY, Michael, E. ,  PENDERGRASS, Daniel, B., Jr. ,  SMITH, Robert, G. ,  THEISS, Silva, K. ,  WEAVER, Billy, L.

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/031 ,  B81B2203/0307 ,  B81B2203/051 ,  B81B2203/053 ,  H01G5/18 ,  H01G5/40 ,  H01H2061/008

Abstract: A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

Abstract translation: 一种千分尺尺寸的多向热致动器，其能够在基本上水平的方向，基本上垂直的方向上重复和快速地位移，和/或其组合。 构造在基板的表面上的多向热致动器包括三个或更多个梁，每个梁在第一端处从一个或多个锚固件悬臂延伸，以大致平行于基板的表面延伸。 机械和电气耦合梁的远端的部件。 将电流施加到包括任何两个或更多个光束的组合的电路中，分别使构件在三个或更多个非平行的径向方向之一中移位。