公开(公告)号：WO2010086865A1

公开(公告)日：2010-08-05

申请号：PCT/IL2010/000090

申请日：2010-02-02

Applicant: ADVANCED DICING TECHNOLOGIES LTD. ,  ARAN, Hagai ,  KITAY, Ron

Inventor： ARAN, Hagai ,  KITAY, Ron

IPC: B23K26/00

CPC classification number: B23K26/082 ,  B23K26/0821 ,  B23K26/083 ,  B23K26/364 ,  B23K26/40 ,  B23K26/705 ,  B23K2201/40 ,  B23K2203/50

Abstract: A system and associated method for laser processing of material specimens comprising a laser mounted to scan onto a track wherein the specimens are forwarded along the track in a forwarding direction, the laser is scanned over said track in a second direction, and the substrates are angled to the track.

Abstract translation: 一种用于激光处理材料试样的系统和相关方法，包括安装成扫描到轨道上的激光器，其中样品沿着传送方向沿着轨道前进，激光在第二方向上在所述轨道上扫描，并且基板成角度 到轨道。