MICROFABRICATION TECHNOLOGY FOR PRODUCING SENSING CELLS FOR MOLECULAR ELECTRONIC TRANSDUCER BASED SEISMOMETER
    1.
    发明申请
    MICROFABRICATION TECHNOLOGY FOR PRODUCING SENSING CELLS FOR MOLECULAR ELECTRONIC TRANSDUCER BASED SEISMOMETER 审中-公开
    用于生产用于分子式电子传感器的地震仪的感应电池的微生物技术

    公开(公告)号:WO2015077394A1

    公开(公告)日:2015-05-28

    申请号:PCT/US2014/066504

    申请日:2014-11-20

    CPC classification number: G01V1/18 G01H11/06 G01P13/00

    Abstract: The invention relates to microfabrication technology for producing sensing cells, for use, for example, in molecular electronic transducer (MET) based seismometers devices. In some aspects, a method for fabricating a sensing element is provided. The method includes providing a first wafer including a first substrate, a second substrate, and a first insulating layer between therebetween, etching a first fluid throughhole through the first substrate, the first insulating layer, and the second substrate, and coating the first substrate and second substrate with a first and second conductive coating, respectively. The method also includes providing a second wafer including a third substrate, a fourth substrate, and a second insulating layer therebetween, etching a second fluid throughhole through the third substrate, the second insulating layer, and the fourth substrate, and coating the third substrate with a third conductive coating from top and the fourth substrate with a fourth conductive coating from back.

    Abstract translation: 本发明涉及用于生产感测单元的微细加工技术,其用于例如基于分子电子换能器(MET)的地震仪装置中。 在一些方面,提供了一种用于制造感测元件的方法。 该方法包括提供包括第一衬底,第二衬底和第二衬底之间的第一绝缘层的第一晶片,通过第一衬底,第一绝缘层和第二衬底蚀刻第一流体通孔,以及涂覆第一衬底和 第二基板分别具有第一和第二导电涂层。 该方法还包括提供包括第三衬底,第四衬底和第二绝缘层的第二晶片,通过第三衬底,第二绝缘层和第四衬底蚀刻第二流体通孔,并且用第 来自顶部和第四基底的第三导电涂层,其后面具有第四导电涂层。

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