公开(公告)号：WO2018046279A1

公开(公告)日：2018-03-15

申请号：PCT/EP2017/070895

申请日：2017-08-18

Applicant: ASML HOLDING N.V. ,  ASML NETHERLANDS B.V.

Inventor： VIOLETTE, Kevin J. ,  AARTS, Igor, Matheus, Petronella ,  KOK, Haico, Victor ,  CATEY, Eric, Brian

IPC: G03F9/00 ,  G03F7/20

Abstract: A method, including printing an apparatus mark onto a structure while at least partly within an apparatus. The structure is part of, or is located on, a substrate table, but is separate from a substrate to be held by the apparatus. Measuring the apparatus mark using a sensor system within the apparatus.

Abstract translation: 包括将装置标记印刷到结构上同时至少部分在装置内的方法。 该结构是衬底台的一部分或位于衬底台上，但与待由该装置保持的衬底分离。 使用设备内的传感器系统测量设备标记。

公开(公告)号：WO2016030177A1

公开(公告)日：2016-03-03

申请号：PCT/EP2015/068407

申请日：2015-08-11

Applicant: ASML HOLDING N.V.

Inventor： LEUNG, King, Pui ,  CHEN, Tao ,  VIOLETTE, Kevin J.

IPC: G03F9/00 ,  G03F7/20

CPC classification number: G03F9/7065 ,  G01B11/272 ,  G02B6/02214 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7088

Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.

Abstract translation: 一种光谱扩展的辐射装置，包括激光器，其被配置为通过激光器的输出发射基本上仅在电磁光谱的可见区域中的辐射，具有标称波长的辐射，以及光学耦合到 激光器，该光纤具有用于接收来自激光器的辐射并具有输出以提供光谱扩展的输出辐射的输入的光纤，所述光纤被配置为将来自激光器的辐射光谱扩展到围绕标称的至少0.5nm的光谱宽度 波长。