公开(公告)号：WO2020035242A1

公开(公告)日：2020-02-20

申请号：PCT/EP2019/068963

申请日：2019-07-15

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSEN, Bas ,  BUTLER, Hans ,  DIJKSHOORN, Alexander, Pascal

IPC: H01L41/09 ,  G03F7/20

Abstract: The disclosed piezo actuator (40) comprises a first pair of electrodes (410), a second pair of electrodes (420), and a piezoelectric material (42) having a first surface (44) and a second surface (46). The first surface is arranged along a first direction (x) and a second direction (y). The first pair of electrodes comprises a first electrode arranged on the first surface, and a second electrode arranged on the second surface. The second pair of electrodes is arranged on further surfaces (430, 432) to shear the piezoelectric material in the second direction. The first pair of electrodes is arranged to elongate the piezoelectric material in a third direction (z), perpendicular to the first and second directions. The first electrode is divided into at least two parts (410a, 410b), and is arranged to rotate the first and second surfaces relatively to each other about the first direction.