公开(公告)号：WO2022008164A1

公开(公告)日：2022-01-13

申请号：PCT/EP2021/065798

申请日：2021-06-11

Applicant: ASML NETHERLANDS B.V.

Inventor： ABDOLVAND, Amir ,  CRAUS, Cristian, Bogdan ,  EZERSKAIA, Anna ,  DOMALAPALLY, Phani Kumar

IPC: G02F1/355 ,  G02F1/383

Abstract: Disclosed is an optical component for a broadband light source device, the optical component being configured for generating a broadband output upon receiving pump radiation and comprising: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas comprising or consisting of Helium.