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1.发明申请
公开(公告)号：WO2022223260A1
公开(公告)日：2022-10-27
申请号：PCT/EP2022/058678
申请日：2022-03-31
Applicant: ASML NETHERLANDS B.V.
Inventor： SHOME, Krishanu , COSTON, Scott, Douglas , DU, Kan
Abstract: A method includes determining optical aberrations of an optical system, identifying an illumination profile that compensates for the optical aberrations of the optical system, and curing a layer of optical cement of an optical device using a modulated energy beam to achieve the identified illumination profile.
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