公开(公告)号：WO2022268433A1

公开(公告)日：2022-12-29

申请号：PCT/EP2022/064473

申请日：2022-05-27

Applicant: ASML NETHERLANDS B.V.

Inventor： SHAYEGAN SALEK, Mir Farrokh ,  KERSTEN, Robert, Renier ,  GUTIERREZ SAN SIMON, Jorge ,  ENGWERDA, Heiko, Jacob, Anthonius

IPC: G03F7/20 ,  H01L21/687 ,  G03F7/705 ,  G03F7/707 ,  H01L21/6875

Abstract: Described are embodiments for predicting a physical condition of a burl of an object holder of a lithographic apparatus. Images of the burls are provided as an input to a machine learning (ML) model to generate a prediction of a physical condition of the burls. Various ML models may be used to generate the prediction. A first ML model generates the prediction using a first type of burl data, e.g., high resolution images of a burl. A second ML model generates the prediction using a second type of burl data, e.g., a subset of the high resolution images of a burl or a low resolution image of the burls. A third ML model generates the prediction using a third type of burl data, e.g., surface descriptive parameters of a burl that are indicative of properties of a surface of the object holder.