公开(公告)号：WO2020164868A1

公开(公告)日：2020-08-20

申请号：PCT/EP2020/051355

申请日：2020-01-21

Applicant: ASML NETHERLANDS B.V.

Inventor： DE HOOGH, Joost ,  NAKIBOGLU, Günes ,  SCHMITZ, Roger, Wilhelmus, Antonius, Henricus ,  VAN DE MOESDIJK, Remco, Yuri ,  KÖK, Yücel ,  TALEBAN FARD, Nafiseh

IPC: G03F7/20

Abstract: A device comprising a compartment, said compartment comprising a wafer stage configured to hold a semiconductor wafer on a clamp, wherein the wafer stage is configured to follow a route within the compartment in operational use, the device comprising: a first component having a first surface facing a first portion of the route; a second component having a second surface facing a second portion of the route; a thermal control system operative to maintain a first temperature of the first surface and a second temperature of the second surface at a common set-point magnitude.