公开(公告)号：WO2022135920A1

公开(公告)日：2022-06-30

申请号：PCT/EP2021/084694

申请日：2021-12-08

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  KRUPIN, Oleg ,  REN, Weiming ,  HU, Xuerang ,  LIU, Xuedong

IPC: H01J37/244 ,  H01J37/28

Abstract: A method of detecting charged particles may include detecting beam intensity as a primary charged particle beam moves along a first direction; acquiring a secondary beam spot projection pattern as the primary charged particle beam moves along a second direction; and determining a parameter of a secondary beam spot based on the acquired secondary beam spot projection pattern. A method of compensating for beam spot changes on a detector may include acquiring a beam spot projection pattern on the detector, determining a change of the beam spot projection pattern, and adjusting a parameter of a detector cell of the detector based on the change. Another method may be provided for forming virtual apertures with respect to detector cells of a detector.

公开(公告)号：WO2022063540A1

公开(公告)日：2022-03-31

申请号：PCT/EP2021/074216

申请日：2021-09-02

Applicant: ASML NETHERLANDS B.V.

Inventor： KRUPIN, Oleg ,  REN, Weiming ,  HU, Xuerang ,  LIU, Xuedong

IPC: H01J37/147 ,  H01J37/21 ,  H01J37/244

Abstract: A method of operating a secondary imaging system of a charged particle beam apparatus may include using an anti-scanning mode. Excitation of a component of the secondary imaging system may be adjusted synchronously with a primary scanning deflection unit. Together with an anti- scanning deflection unit performing anti-scanning, a component of the secondary imaging system, such as a lens, may be adjusted in step. As scanning and anti-scanning is performed, excitation parameters of the component may also be constantly updated.