公开(公告)号：WO2019192821A1

公开(公告)日：2019-10-10

申请号：PCT/EP2019/056504

申请日：2019-03-14

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  DONG, Zhonghua ,  LAI, Rui-Ling

IPC: H01J37/244 ,  H01L27/146

Abstract: Detectors and detection systems are disclosed. A substrate comprises a plurality of sensing elements (311-313) including a first plurality of the sensing elements and a second plurality of the sensing elements, and a plurality of sections (321-324) configured to connect the first plurality to an output, and connect the second plurality to an output. Switching regions may be provided between the sensing elements that are configured to connect two or more sensing elements. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy and/or beam intensity.

公开(公告)号：WO2020173681A1

公开(公告)日：2020-09-03

申请号：PCT/EP2020/053059

申请日：2020-02-07

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  LAI, Rui-Ling

IPC: H01J37/244 ,  H01L27/146

Abstract: A detector is provided with a sensing element (711) and a corresponding gain element (721). The gain element includes a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region (750) of first conductivity is provided adjacent to a region (740) of second conductivity, and a region of third conductivity (760) is provided adjacent to the region of second conductivity. The sensing element may include a section (720) in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region (730) of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.

公开(公告)号：WO2019053173A1

公开(公告)日：2019-03-21

申请号：PCT/EP2018/074833

申请日：2018-09-14

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  LAI, Rui-Ling ,  DONG, Zhonghua

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements (501-503) including a first element (502) and a second element (503), and a switching region (3009) therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：WO2022037980A1

公开(公告)日：2022-02-24

申请号：PCT/EP2021/072129

申请日：2021-08-09

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  LAI, Rui-Ling ,  STEPANENKO, Nickolay ,  BEX, Jan ,  HENDRIX, Ronny ,  CORNELISSEN, Lidewij, Elisa ,  BROOKHUIS, Robert Anton

IPC: H01J37/16 ,  H01J37/244 ,  H05K1/02

Abstract: Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough. Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.

公开(公告)号：WO2019233991A1

公开(公告)日：2019-12-12

申请号：PCT/EP2019/064445

申请日：2019-06-04

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  DONG, Zhonghua ,  LAI, Rui-Ling ,  KANAI, Kenichi

IPC: H01J37/244

Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

公开(公告)号：WO2019053174A1

公开(公告)日：2019-03-21

申请号：PCT/EP2018/074834

申请日：2018-09-14

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yongxin ,  DONG, Zhonghua ,  LAI, Rui-Ling

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array (600) are disclosed. According to certain embodiments, a substrate (600) comprises a plurality of sensing elements (611-613) including a first element (611) and a second element (612). The detector comprises a switching element (619) configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.