公开(公告)号：WO2022243006A1

公开(公告)日：2022-11-24

申请号：PCT/EP2022/061382

申请日：2022-04-28

Applicant: ASML NETHERLANDS B.V.

Inventor： URONE, Dustin, Michael ,  THERIAULT, Gregory ,  NGUYEN, Lam ,  MCKENZIE, Paul, Alexander

IPC: G03F7/20 ,  H05G2/00

Abstract: A metrology system includes: a light apparatus, a detection apparatus, and a control apparatus in communication with the detection apparatus. The light apparatus is configured to generate an optical probe propagating along a probe optical axis that intersects a target axial path at a probe region, the target axial path extending primarily along an X axis of an X, Y, Z coordinate system. The detection apparatus is configured to detect produced light at a plurality of distinct wavelengths, each wavelength associated with a distinct location along an X-transverse axis of the X, Y, Z coordinate system, the produced light being produced from an interaction in the probe region between the optical probe and a target traveling along the target axial path. The control apparatus is configured to analyze the detected light and determine position information relating to the target along the X-transverse axis of the X, Y, Z coordinate system.